Non-destructive imaging of buried interfaces using decelerated electron-beam in scanning electron microscopy

Hirohata, A.; Lloyd, D.C.; Jackson, E.; Elphick, K.; Quill, S.

doi:10.1016/b978-0-323-91150-4.00003-3

Non-Destructive Material Characterization Methods 2024

DOI: 10.1016/b978-0-323-91150-4.00003-3

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Non-destructive imaging of buried interfaces using decelerated electron-beam in scanning electron microscopy

A. Hirohata,

D.C. Lloyd,

E. Jackson

et al.

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Non-destructive imaging of buried interfaces using decelerated electron-beam in scanning electron microscopy

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References 32 publications

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