1994
DOI: 10.1016/0257-8972(94)90034-5
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Non-destructive study of the ion-implantation-affected zone (the long-range effect) in titanium nitride

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Cited by 21 publications
(7 citation statements)
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“…One unique merit is that this method is free from adhesive problems and is capable of changing the grain size of the original components when the ions are implanted into the matrix [11]. A further merit is that the high-energy ions not only modify structures and components of the implanted subsurface at tens of nanometers, but also impact the zone located underneath the implanted subsurface by long-range effect [12,13]. Furthermore, it has been reported in many cases that the irradiation of a material by two or more distinct types of ions (for example, gas and metal ions) results in more significant changes in the properties of the material [14,15].…”
Section: Introductionmentioning
confidence: 99%
“…One unique merit is that this method is free from adhesive problems and is capable of changing the grain size of the original components when the ions are implanted into the matrix [11]. A further merit is that the high-energy ions not only modify structures and components of the implanted subsurface at tens of nanometers, but also impact the zone located underneath the implanted subsurface by long-range effect [12,13]. Furthermore, it has been reported in many cases that the irradiation of a material by two or more distinct types of ions (for example, gas and metal ions) results in more significant changes in the properties of the material [14,15].…”
Section: Introductionmentioning
confidence: 99%
“…The terms “long‐range action” and “long‐range effects” as applied to the bombardment of solids with accelerated ions have become well established and relate to the experimental facts of changes to the structure and properties of materials at depth L , which is much in excess of the mean projected range R p of ions. Even though in some cases special investigations fail to register long‐range effects under ion bombardment, and in other cases such effects may be attributed to trivial reasons, e.g., heating of several hundred degrees by powerful ion beams ( P s ≥ 1–10 W cm −2 ) reliable data testify to changes in the structure and properties of materials over an anomalously large (or considerably increased) depth , which cannot be explained by the known reasons. It was found that the maximum response to the ion irradiation as well as the most extended impact zone is observed for metastable media with a high stored energy.…”
Section: Introductionmentioning
confidence: 99%
“…However, many experimental facts gathered in the course of studying different properties and microstructure of ion‐implanted materials testify to the fact that the effect of accelerated ion beams on materials is not limited to the ions penetration zone, but extends to much greater distances.…”
Section: Introductionmentioning
confidence: 99%
“…Perry has shown that TiN withstands much radiation damage from argon with 100 keV implant energy and up to 4 × 10 [87,82]. Transmission electron microscope investigations and grazing incidence x-ray diffraction depth profiles showed that, with the implanting of large doses of a heavy ion, the damage profile reaches far beyond the boundaries of displacement damage or implant [88,89,87,86,53,90,91,92,93,94,82,95,96].…”
Section: Radiation Tolerancementioning
confidence: 99%