SSRN Journal
 2022
DOI: 10.2139/ssrn.4139613
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Non-Integral Depth Measurement of High-Aspect-Ratio Multi-Layer Microstructures Using Numerical-Aperture Shaped Beams

Wei-Hsin Chein
1
,
Fusheng Yang
2
,
Komal Thakur
3
et al.
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