In this paper, we are interested in the mathematical model of MEMS devices which is presented by the following equation on (0, T ) × Ω :where Ω is a bounded domain in R n and λ, γ > 0. In this work, we have succeeded to construct a solution which quenches in finite time T only at one interior point a ∈ Ω. In particular, we give a description of the quenching behavior according to the following final profile1 3 2010 Mathematics Subject Classification. Primary: 35K50, 35B40; Secondary: 35K55, 35K57.