Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films

Tung, Ryan C.; Lee, Jin Woo; Sumali, Hartono; Raman, Arvind

doi:10.1088/0960-1317/21/2/025003

Cited by 7 publications

(8 citation statements)

References 21 publications

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“…Our two-dimensional hydrodynamic assumptions are bolstered both by the small angle of cantilever tilt in the AFM system (typically 11 • -13 • ) and the increased cantileversample gap provided by the long (>10 μm) AFM tip, each of which serves to suppress three-dimensional effects. 16,17 We ignore gas compressibility effects and Reynolds-based squeeze film approaches 14,18 due to the relatively low squeeze numbers of the system afforded by the cantilever tilt and increased gap heights. Furthermore, semi-analytical formulas for the calculation of the two-dimensional hydrodynamic function are readily available and easy to use.…”

Section: Theorymentioning

confidence: 99%

Hydrodynamic corrections to contact resonance atomic force microscopy measurements of viscoelastic loss tangent

Tung

Killgore²,

Hurley³

2013

Review of Scientific Instruments

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We present a method to improve accuracy in measurements of nanoscale viscoelastic material properties with contact resonance atomic force microscope methods. Through the use of the two-dimensional hydrodynamic function, we obtain a more precise estimate of the fluid damping experienced by the cantilever-sample system in contact resonance experiments, leading to more accurate values for the tip-sample damping and related material properties. Specifically, we consider the damping and added mass effects generated by both the proximity of the cantilever to the sample surface and the frequency dependence on the hydrodynamic loading of the system. The theoretical correction method is implemented on experimental contact resonance measurements. The measurements are taken on a thin polystyrene film and are used to determine the viscoelastic loss tangent, tan δ, of the material. The magnitude of the corrections become significant on materials with low tan δ (<0.1) and are especially important for measurements made with the first flexural mode of vibration.

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Section: Theorymentioning

confidence: 99%

Hydrodynamic corrections to contact resonance atomic force microscopy measurements of viscoelastic loss tangent

Tung

Killgore²,

Hurley³

2013

Review of Scientific Instruments

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“…In the characterization of NEMS and MEMS under periodic electrical actuation, vibration profile (VP) measurements are important in conjunction with frequencydomain spectral studies [1][2][3][4][5]. While the latter yield important mechanical properties, the former can be useful in many applications, including optimization of the excitation parameters, aiding the identification of sites most effective for localized functionalization to enable sensing, and in studies of dissipation effects such as intrinsic and pressure-dependent damping [3]. Space-domain profiling is crucial in the presence of significant nonlinearities where boundary conditions become critical [6].…”

Section: Introductionmentioning

confidence: 99%

“…Space-domain profiling is crucial in the presence of significant nonlinearities where boundary conditions become critical [6]. For instance, in typical capacitive electrical drive configuration, the force between the grounded substrate and a device fabricated by patterned suspended poly-crystalline silicon (polySi) film (serving as an electrode) is inherently nonlinear with the drive amplitude and film stress [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Synchronous imaging for rapid visualization of complex vibration profiles in electromechanical microresonators

Linzon

Joe

Ilić

et al. 2012

Journal of Applied Physics

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Synchronous imaging is used in dynamic space-domain vibration profile studies of capacitively driven, thin n+ doped poly-silicon microbridges oscillating at rf frequencies. Fast and high-resolution actuation profile measurements of micromachined resonators are useful when significant device nonlinearities are present. For example, bridges under compressive stress near the critical Euler value often reveal complex dynamics stemming from a state close to the onset of buckling. This leads to enhanced sensitivity of the vibration modes to external conditions, such as pressure, temperatures, and chemical composition, the global behavior of which is conveniently evaluated using synchronous imaging combined with spectral measurements. We performed an experimental study of the effects of high drive amplitude and ambient pressure on the resonant vibration profiles in electrically-driven microbridges near critical buckling. Numerical analysis of electrostatically driven post-buckled microbridges supports the richness of complex vibration dynamics that are possible in such micro-electromechanical devices.

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“…Fluid-structure interactions should be considered carefully when the resonant frequencies and quality factors of the microcantilever are calculated because of the size effect in MEMS packed at low ambient pressure [12][13][14]. In a microcantilever vibrating above a rigid flat plate, such as the resistive RF-MEMS switch shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

Analysis of fluid-structure interaction for predicting resonant frequencies and quality factors of a microcantilever on a squeeze-film

Lee

2011

J Mech Sci Technol

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The dynamic behavior of a flexible microcantilever vibrating above a substrate such as the cantilever-based structure of a radio frequency microelectromechanical switch is strongly affected by the motion of gas between the microcantilever and the substrate. In this paper, parameter studies to investigate the effects of geometry, material properties of a microcantilever, and ambient pressure on the resonant frequencies and quality factors of the microcantilever are described. A Reynolds-equation-based continuum model is used to derive the gas force reflecting the gas rarefaction effect due to the size effect of MEMS packed at low ambient pressure. The frequency response function of an inertially-excited microcantilever is developed using the mode superposition method. One interaction parameter, including information on geometry, material properties of a microcantilever, and ambient pressure, is defined to investigate the fluidstructure interaction in a microcantilever vibrating on a squeeze-film. The quality factors of the first three bending modes increase with the decreasing interaction parameter. The changing trend of associated resonant frequencies depends on the order of the bending mode.

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Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films

Cited by 7 publications

References 21 publications

Hydrodynamic corrections to contact resonance atomic force microscopy measurements of viscoelastic loss tangent

Hydrodynamic corrections to contact resonance atomic force microscopy measurements of viscoelastic loss tangent

Synchronous imaging for rapid visualization of complex vibration profiles in electromechanical microresonators

Analysis of fluid-structure interaction for predicting resonant frequencies and quality factors of a microcantilever on a squeeze-film

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