Abstract:Phase-shifting interferometry (PSI) is a well-known technique used to calculate the phase of a resulting wavefront. This wavefront is commonly originated from the superposition of a known reference wavefront with a distorted wavefront, resulting in an interference pattern. In order to extract information about the resulting wavefront (which can be related to surfaces thicknesses, surface roughness, optical power, material homogeneity, temperature, index of refraction, just to mention a few), a set of interfere… Show more
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