Non-seed chemical bath deposition of ZnO films in a rotating continuous flow reactor with various carboxylic acids and their application to transparent conductive films

Wagata, Hajime; Shioiri, Naoya; Tanaka, Yuya; Yokogawa, Ryo; Ogura, Atsushi

doi:10.1039/d2ce01136k

CrystEngComm

2022

DOI: 10.1039/d2ce01136k

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Non-seed chemical bath deposition of ZnO films in a rotating continuous flow reactor with various carboxylic acids and their application to transparent conductive films

Hajime Wagata

Naoya Shioiri

Yuya Tanaka

et al.

Abstract: ZnO films were successfully fabricated by non-seed chemical bath deposition (CBD) using a rotating flow reactor without seed layers. The microstructural control of the ZnO films is important for various...

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2024

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Modulation of optical properties and defects of ZnO films with preferred orientations by annealing in different atmospheres

Guo,

Dai,

2024

The Journal of Chemical Physics

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Nonpolar (100), polar (002), semipolar (101), and nonpolar (110) preferred oriented ZnO films were synthesized by regulated growth using the chemical bath deposition method. The crystallinity, surface morphology, and optical properties of ZnO films with different preferred orientations after annealing in different atmospheres were systematically investigated. The experimental results show an increase in crystallinity and a decrease in surface roughness of the films after annealing; in particular, the optical transmittance of semipolar (101) preferred oriented ZnO films was significantly higher than that of the other samples. XPS and PL spectra confirmed that annealing in argon effectively increased donor defects, whereas annealing in oxygen and ozone reduced donor defects in the films, and that ozone annealing was best suited to enhance acceptor defects in nonpolar (110) preferred oriented ZnO films. Argon annealing is the best for the enhancement of donor defects in polar (002) preferred oriented ZnO films. This work achieves modulation of optical properties and defects of ZnO films by annealing in different atmospheres, which provides new ideas for the application of ZnO materials.

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Modulation of optical properties and defects of ZnO films with preferred orientations by annealing in different atmospheres

Guo,

Dai,

2024

The Journal of Chemical Physics

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ZnO thin films with controllable morphologies and crystal orientation fabricated by the mist spin spray method

Son,

Kubota,

Matsushita

2024

J. Ceram. Soc. Japan

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Non-seed chemical bath deposition of ZnO films in a rotating continuous flow reactor with various carboxylic acids and their application to transparent conductive films

Abstract: ZnO films were successfully fabricated by non-seed chemical bath deposition (CBD) using a rotating flow reactor without seed layers. The microstructural control of the ZnO films is important for various...

Cited by 2 publications

References 62 publications

Modulation of optical properties and defects of ZnO films with preferred orientations by annealing in different atmospheres

Modulation of optical properties and defects of ZnO films with preferred orientations by annealing in different atmospheres

ZnO thin films with controllable morphologies and crystal orientation fabricated by the mist spin spray method

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