Nondestructive detection of optics subsurface defects by fluorescence image technique

Hongjie, 刘红婕 Liu; Fengrui, 王凤蕊 Wang; Feng, 耿 峰 Geng; Xiaoyan, 周晓燕 Zhou; Jin, 黄进 Huang; Xin, 叶鑫 Ye; Xiaodong, 蒋晓东 Jiang; Weidong, 吴卫东 Wu; Liming, 杨李茗 Yang

doi:10.3788/ope.20202801.0050

Cited by 4 publications

(1 citation statement)

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“…Mao et al carried out a nanoindentation test to research the effect of strain rate on hardness [16] . Liu et al characterized the optics surface and subsurface defects and analyzed the impact of different defects on LIDT using statistical methods [17] . In terms of material polishing removal efficiency, Jiang et al compared the difference between the normal polishing force, tangential polishing force, material removal rate, and surface roughness in traditional magnetic compound fluid (MCF) polishing and ultrasonic-assisted MCF polishing [18][19] , Ye et al studied the optical material removal characteristics and surface quality formation mechanism based on the magnetic-assisted polishing technology and evaluated the optical material removal rate [20][21] .…”

Section: Introductionmentioning

confidence: 99%

Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Wei,

Fan,

Zhong

et al. 2024

Advanced Fiber Laser Conference (AFL2023)

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In view of the problem that various fused silica materials have different characteristics, which could cause differences in processability, the mechanical properties of fused silica materials were studied through nanoindentation experiments. Relationship curves between indentation load and material hardness/elastic modulus were obtained for different fused silica optics. The fracture characteristics of fused silica materials were also studied using the gradient force imprinting method, and the fracture toughness and critical load of crack generation were calculated for different fused silica materials. The ability of different fused silica materials to resist crack instability propagation under the same process conditions was also clarified. Furthermore, the polishing removal characteristics of fused silica materials were researched, and the polishing removal efficiency of different materials was obtained through the magnetorheologi cal finishing (MRF) spotting method. It was further verified that the hardness was positively correlated with the material polishing removal efficiency. Based on the characteristics of different fused silica materials, the optical ultra -precision processing parameters could be selected. This is of great significance for low-defect and high-efficiency ultra-precision machining of optics.

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Section: Introductionmentioning

confidence: 99%

Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Wei,

Fan,

Zhong

et al. 2024

Advanced Fiber Laser Conference (AFL2023)

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Study on the relationship between the fluorescence characteristics of quantum dots and the subsurface damage of fused silica

Wang

Gao

Cui

et al. 2021

2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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Detection of surface defects and subsurface defects of polished optics with multisensor image fusion

Sun

Wang

et al. 2022

PhotoniX

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Surface defects (SDs) and subsurface defects (SSDs) are the key factors decreasing the laser damage threshold of optics. Due to the spatially stacked structure, accurately detecting and distinguishing them has become a major challenge. Herein a detection method for SDs and SSDs with multisensor image fusion is proposed. The optics is illuminated by a laser under dark field condition, and the defects are excited to generate scattering and fluorescence lights, which are received by two image sensors in a wide-field microscope. With the modified algorithms of image registration and feature-level fusion, different types of defects are identified and extracted from the scattering and fluorescence images. Experiments show that two imaging modes can be realized simultaneously by multisensor image fusion, and HF etching verifies that SDs and SSDs of polished optics can be accurately distinguished. This method provides a more targeted reference for the evaluation and control of the defects of optics, and exhibits potential in the application of material surface research.

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Nondestructive detection of optics subsurface defects by fluorescence image technique

Cited by 4 publications

References 0 publications

Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Study on the relationship between the fluorescence characteristics of quantum dots and the subsurface damage of fused silica

Detection of surface defects and subsurface defects of polished optics with multisensor image fusion

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