2020
DOI: 10.1002/zamm.201900104
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Nonlinear behavior of a vibrating axially moving small‐size beam under an electrostatic force

Abstract: Small size (micro/nano)‐scale beams constitute important building blocks of microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS). Emerging roll‐based, high rate, manufacturing processes can make these small size‐beams vibrate, while they are axially moving. In this paper, an analytical‐numerical study on the nonlinear transverse vibration of the representative case of axially moving micro‐beam under an electrostatic force is conducted. The analytical model is realized by employing Hamilto… Show more

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Cited by 4 publications
(2 citation statements)
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References 37 publications
(33 reference statements)
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“…Unlike most research studies applying Galerkin method to investigate the moving nanosystems [39,41,46], the present work employs the composite beam function method [47] to develop the dynamic stability of axially moving nanoplates. e approach assumes the displacement function according to boundary conditions, so that the governing equation can be solved numerically directly.…”
Section: Numerical Results and Discussionmentioning
confidence: 99%
“…Unlike most research studies applying Galerkin method to investigate the moving nanosystems [39,41,46], the present work employs the composite beam function method [47] to develop the dynamic stability of axially moving nanoplates. e approach assumes the displacement function according to boundary conditions, so that the governing equation can be solved numerically directly.…”
Section: Numerical Results and Discussionmentioning
confidence: 99%
“…A typical electrostatically actuated NEMS consists of a fixed electrode and a deformable electrode [3][4][5] For the two poles with applied electric potential difference, the deformable electrode bends under the electrostatic force and moves closer to the fixed electrode [6]. When the voltage exceeds a critical value, the deformable electrode loses its stability and suddenly adheres to the fixed electrode, which is called the pull-in phenomenon [7]. In this case, the critical voltage and the corresponding displacement are called pull-in voltage and pull-in displacement, respectively.…”
Section: Introductionmentioning
confidence: 99%