Nonlinear behaviors in back-gate effects of FDSOI MOSFETs at cryogenic temperatures

Abstract

In this work, we systematically investigate the DC performance of Fully Depleted Silicon-on-insulator (FD-SOI) MOSFETs at both room and cryogenic temperatures as low as 77 K. The influences of back-gate bias on normal and flip-well devices are measured and analyzed. Both types devices display non-linear behaviors when adjusting the back-gate voltage at cryogenic temperatures. Notably, the non-linear effects are more prominent in normal-well devices. The possible reasons are analyzed and verified by TCAD simulation, suggesting that normal-well devices are more susceptible to the formation of depletion regions between the buried oxide layer and the well. This phenomenon disrupts the linearity of the back-gate effect. This research contributes to understanding and characterizing of the back-gate effects in cryogenic environments and holds potential for high-performance computing applications.