2014
DOI: 10.1155/2014/150345
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Nonlinear Current Control for Reluctance Actuator with Hysteresis Compensation

Abstract: The next-generation fine stage of the wafer scanner needs a suitable actuator to meet the requirements of high speed, high acceleration, and high precision. The voice coil actuator is no longer the best choice because of its large size and the heat dissipation is difficult to solve. The reluctance actuator can provide a big force based on a unique property of small volume and low current, making it a very suitable candidate. But the strong nonlinearity such as the hysteresis between the current and force limit… Show more

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Cited by 6 publications
(3 citation statements)
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“…The deformation of the membranes provides a sti↵ness to this moving mass. The actuators are linearized using an approximation of the measured relationship to compensate the inherent nonlinearity, as proposed by [25]. Now a simplified 1-D model can be proposed of the overall system and its subsystems (See Figure 4).…”
Section: Modelling and Design Of The Actuatormentioning
confidence: 99%
“…The deformation of the membranes provides a sti↵ness to this moving mass. The actuators are linearized using an approximation of the measured relationship to compensate the inherent nonlinearity, as proposed by [25]. Now a simplified 1-D model can be proposed of the overall system and its subsystems (See Figure 4).…”
Section: Modelling and Design Of The Actuatormentioning
confidence: 99%
“…Hence, proper control strategies are essential for this purpose. ere are two basic control strategies of the grid-connected current, that is, indirect current control and direct current control [16][17][18][19]. Indirect current control uses the vector relationship of the output voltage, so that the grid-connected current can achieve the expected amplitude and phase, without the introduction of AC current feedback.…”
Section: Introductionmentioning
confidence: 99%
“…Additional efforts have investigated the magnetic hysteresis effect on the force generation of reluctance actuators for high-precision applications. One-dimensional analyses can be found in [22,23], whereas 2D and 3D finite element (FE) approaches have been also proposed [24]. All of these works address the hysteresis phenomenon exclusively on soft magnetic materials.…”
Section: Introductionmentioning
confidence: 99%