2004
DOI: 10.1051/epjap:2004212
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Nonlinear diffusion in excited Si crystals

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Cited by 10 publications
(23 citation statements)
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“…Using the known concentration of Si atoms 5 × 10 22 cm −3 [13] and (6), we can find the relative concentration of singly charged vacancies N r = 1.35 × 10 −10 . Then using the known equation [10]: [17]. The obtained results show the possibility of introducing boron and phosphorus into silicon using X-rays irradiation at room temperature.…”
Section: Resultsmentioning
confidence: 99%
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“…Using the known concentration of Si atoms 5 × 10 22 cm −3 [13] and (6), we can find the relative concentration of singly charged vacancies N r = 1.35 × 10 −10 . Then using the known equation [10]: [17]. The obtained results show the possibility of introducing boron and phosphorus into silicon using X-rays irradiation at room temperature.…”
Section: Resultsmentioning
confidence: 99%
“…We see that the saturation time t s1 = 200 min may be obtained for the sample with singly charged vacancies of high mobility [9] and saturation time t s2 = 415 min for slower doubly negatively charged vacancies [9]. It was only our assumption made using the same publications presented in [9,10]. We obtained that diffusing vacancies had negative charge at room temperature from the Hall mobility measurements [9].…”
Section: Model Calculations and Discussionmentioning
confidence: 99%
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“…The main conclusion following from results presented in [11,21,25] is the relation between superdiffusivity of metastable vacancies and lattice relaxation of Si crystals excited by soft X-rays. We obtained that after 3 h irradiation the large relaxation of lattice was achieved.…”
Section: Discussionmentioning
confidence: 97%