Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer

Benyong, 陈本永 Chen; Ruizhen, 穆瑞珍 Mu; Yanjiang, 周砚江 Zhou; Dacheng, 李达成 Li

doi:10.3788/cjl20083502.0240

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2009

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“…As an important part of the micron/nanometer-size techniques, micron/nanometer-size measuring techniques occupy significant position in researches and developments of micron/nanometer-size techniques, materials and devices [1][2][3][4][5][6]. In recent years, capacitive sensors have got wide attentions and applications in areas of nanometer-size testing and machining for their notable virtues.…”

Section: Introductionmentioning

confidence: 99%

Study of Compensatation of the Nonlinear Errors for Thick Film Capacitor Micro-Displacement Sensor

Gao

Chang

et al. 2009

AMR

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This paper discusses the nonlinear errors for a novel gap variation-type thick film capacitive micro-displacement sensor. The micro-displacement sensor is developed for measuring the PZT displacement based on the pattern of PZT deformation-force sensing-displacement. In theory, The capacitor detects the micro-displacement driven by the PZT ceramic，and the variation of capacitance can be transformed into real-time output voltage signals. In this process, there would be some nonlinear errors. Based on the structure and operational principle of the sensor, possible nonlinear errors and their causes are analyzed. Then targeted measures are adopted to deal with them. Results show that the sensor’s linearity can be improved by effective compensating methods.

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