Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

Dai, Jiacheng; Zeng, Wenhan; Zhong, Wenbin; Jiang, Xiangqian (Jane); Lu, Wenlong

doi:10.1016/j.measurement.2023.114091

Cited by 5 publications

(2 citation statements)

References 19 publications

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“…To compare the error distributions more intuitively, figure 6(d) shows the density distribution curves of these errors. The low-frequency variations in the errors come from nonlinear systematic errors in the CCM measurements [11], which cannot be improved by optimizing the feature localization algorithm and need to be compensated for by other methods. This low-frequency curve can be used as a benchmark for evaluating the error of the CAs, and the ATCA and DCCA produce a non-smooth jump at several positions, which comes from the systematic error of discrete sampling.…”

Section: Comparative Experiments Of Linear Interpolation-based Ca On ...mentioning

confidence: 99%

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Enhancing precision of chromatic confocal measurement through linear interpolation based centroid algorithm

Lu,

Dai,

Zeng

et al. 2024

Surf. Topogr.: Metrol. Prop.

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In chromatic confocal measurement (CCM), the accuracy and precision of the results rely on the robustness of the spectral power distribution (SPD) signal resolution. However, traditional centroid algorithms struggle with the inherent discretization of the SPD signal, leading to significant measurement errors. To address this issue, a linear interpolation based centroid algorithm is proposed to improve the robustness of the results. In the precision calibration experiment conducted with the in-house developed chromatic confocal sensors, the proposed algorithm demonstrates good robustness. Moreover, it achieves a 50% enhancement in the accuracy of a 4 mm range, improving from 1µm to 0.5µm.

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Section: Comparative Experiments Of Linear Interpolation-based Ca On ...mentioning

confidence: 99%

“…Further, the wavelength-displacement relationship determined by the chromatic confocal design enables mapping from the focused wavelength l to the measured distance z [9]. This mapping relationship can be constructed from the Buchdahl formula [10], and the final approximate formula [11] is:…”

Section: Introductionmentioning

confidence: 99%