“…Microelectromechanical systems (MEMS) have increasingly attracted considerable interest due to their small size and low power consumption since the integrated circuit (IC) technology rise in 1990. Related investigations not only focus on fundamental questions, such as frequency locking [28,26,27], internal resonance [7,20,41], mode coupling [4,29,9], pull-in [14,43], exit time [42], bilayer effect [17], etc., but also in tremendous potential applications including gas/mass sensing [12,34,33], filters [1], memory devices [39] and time keeping [3]. Due to the size effect, MEMS system is easily driven into nonlinear regime.…”