1996
DOI: 10.1063/1.117141
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Nonlinear optical mapping of silicon carbide polytypes in 6H-SiC epilayers

Abstract: A fast and noninvasive mapping tool based on spatially resolved optical second-harmonic generation is presented for the detection of silicon carbide polytypes in 6H-SiC epilayers. 3C-SiC microcrystallites of different orientations are identified from second-harmonic rotational anisotropy scans. The method reported can be used as an efficient in situ control of SiC growth processes.

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Cited by 15 publications
(11 citation statements)
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“…The properties of the second-order nonlinear susceptibility of SiC have been analyzed recently in several detailed theoretical papers [11][12][13][14], with a few experimental works [21][22][23][24] demonstrating the potential of secondharmonic generation for the investigation of a broad class of SiC samples [21,22], including SiC nanopowders [23,24]. In our experiments, we have studied both second-and third-order optical nonlinearities of SiC/PMMA nanocomposite films.…”
mentioning
confidence: 99%
“…The properties of the second-order nonlinear susceptibility of SiC have been analyzed recently in several detailed theoretical papers [11][12][13][14], with a few experimental works [21][22][23][24] demonstrating the potential of secondharmonic generation for the investigation of a broad class of SiC samples [21,22], including SiC nanopowders [23,24]. In our experiments, we have studied both second-and third-order optical nonlinearities of SiC/PMMA nanocomposite films.…”
mentioning
confidence: 99%
“…The fourfold symmetry dominates the twofold symmetry, because bulk contributions tend to dominate the surface contributions due to the longer interaction length in the case of bulk when compared to surfaces consisting of only a few atomic layers26.…”
Section: Resultsmentioning
confidence: 99%
“…Electroluminescence was used for imaging luminescent defects in PiN diodes in situ , during forward biasing, and ex situ , after degradation of the diodes 22 23 . Another optical technique, second harmonic generation (SHG) is known to be a rapid, noninvasive and sensitive investigation method used to identify different polytypes 24 and structural defects in SiC epilayers 25 , to map microcrystalline inclusions of SiC polytypes in 6H-SiC epilayers 26 and to probe the crystalline order of 3C-SiC films grown on (111) Si substrates by rotational anisotropy measurements 27 .…”
mentioning
confidence: 99%
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“…In terms of non-linear-optical tensor properties, this implies that not only frequency dependence measurements but also polarization studies can provide information on the properties of these materials and can be employed to characterize samples by distinguishing, for example, one polytype from another or by detecting the presence of SiC in a substrate or a thin film. The properties of the second-order nonlinear susceptibility of SiC have been analyzed recently in several detailed theoretical papers, 37,38 with a few experimental studies 39 -42 demonstrating the potential of SHG for the investigation of a broad class of SiC samples, 39,40 including SiC nanopowders 41 and SiC nanocrystal-doped polymers. 42 Much less is known, however, about the third-order optical non-linearities of SiC and only a few experiments on cubic susceptibility-controlled THG in SiC nanocomposite samples have been reported so far.…”
Section: Introductionmentioning
confidence: 99%