2023
DOI: 10.1088/1402-4896/acc287
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Nonlinearity modulation in a mode-localized mass sensor based on electrostatically coupled resonators under primary and superharmonic resonances

Abstract: A general model of a mode-localized mass sensor incorporating two weakly coupled clamped-clamped microbeams under electrostatic excitation is presented, and a reduced-order model considering quadratic and cubic nonlinearities is established. The multiple time scales method is used to solve the dynamic characteristics of the coupled resonators under primary resonance, simultaneous superharmonic and primary excitations, and one-third superharmonic resonance respectively, and to analyze the contribution of each h… Show more

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Cited by 9 publications
(2 citation statements)
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“…Bistable structures are characterized by having two stable positions with minimum potential energy, as well as one unstable position with maximum potential energy within their stroke range. As a result, bistable structures have applications in various fields, including micro-electromechanical systems [1][2][3], switch [4][5][6], relays [7], and space collapsible mechanisms [8]. However, traditional actuation components for stable state transition like motors and pumps often pose challenges in terms of their complex structures and heavy weight.…”
Section: Introductionmentioning
confidence: 99%
“…Bistable structures are characterized by having two stable positions with minimum potential energy, as well as one unstable position with maximum potential energy within their stroke range. As a result, bistable structures have applications in various fields, including micro-electromechanical systems [1][2][3], switch [4][5][6], relays [7], and space collapsible mechanisms [8]. However, traditional actuation components for stable state transition like motors and pumps often pose challenges in terms of their complex structures and heavy weight.…”
Section: Introductionmentioning
confidence: 99%
“…However, in circuits in which the nonlinearities are not closely connected, the procedure fails. This is the case of circuits containing two nonlinear resonators, which have recently attracted interest for a variety of applications, including nonlinear isolators [19], [20], [21], [22], [23], robust wireless power transfer [24], [25], and sensors [26], [27], [28], [29], [30], [31]. The multivalued solution may originate in either one or another resonator or be the result of the combined action of both.…”
Section: Introductionmentioning
confidence: 99%