1991
DOI: 10.1002/sca.4950130606
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Nonoptical method of spectral cathode luminescence analysis

Abstract: A new method for measuring a monochromatic wavelength of cathodoluminescence using a scanning electron microscope is described. By eliminating losses of the optical system and ensuring a large relative aperture, it is possible to measure the wavelengths of luminous surface spots and compositions of spot sizes up to 2 pm; spectral resolution is about 3 nm.

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Cited by 3 publications
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“…This method was used for identification of monochromatic radiation [3,4]. The photoelectron method being applied for analysis of cathode luminescence radiation has shown some advantages over the optical ones, thus creating the new means of making contrast in surface cathode luminescence analysis by scanning electron microscopy [5][6][7].…”
Section: Introductionmentioning
confidence: 99%
“…This method was used for identification of monochromatic radiation [3,4]. The photoelectron method being applied for analysis of cathode luminescence radiation has shown some advantages over the optical ones, thus creating the new means of making contrast in surface cathode luminescence analysis by scanning electron microscopy [5][6][7].…”
Section: Introductionmentioning
confidence: 99%