Nonthermal Plasma Synthesis of Metallic Ti Nanocrystals

Abstract

Nanoscale metallic titanium (Ti) offers unique energetic and biocompatible characteristics for the aerospace and biomedical industries. A rapid and sustainable method to form purified Ti nanocrystals is still in demand due to their high oxygen affinity. Herein, we report the production of highly purified Ti nanoparticles with a nonequilibrium face center cubic (FCC) structure from titanium tetrachloride (TiCl4) via a capacitively coupled plasma (CCP) route. Furthermore, we demonstrate a secondary H2 treatment plasma as an effective strategy to improve the air stability of a thin layer of nanoparticles by further removal of chlorine from the particle surface. Hexagonal and cubic-shaped Ti nanocrystals of high purity were maintained in the air after the secondary H2 plasma treatment. The FCC phase potentially originates from small-sized grains in the initial stage of nucleation inside the plasma environment, which is revealed by a size evolution study with variations of plasma power input.