2016
DOI: 10.1088/0963-0252/25/2/025009
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Normalized ion distribution function in expanding sheaths of 2D grid electrodes

Abstract: Ion distributions in expanding collisionless sheaths of two-dimensional (2D) grid electrodes were studied by using XOOPIC (particle-in-cell) simulations when short pulses of negative high-voltage were applied to electrodes immersed in plasmas. 2D grid electrodes consist of a periodic array of cylindrical electrodes, and the opening ratio of the grid electrodes is defined by the ratio of the spacing between cylindrical electrodes to the periodic length of the grid electrodes. In this paper, we introduce a norma… Show more

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Cited by 4 publications
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