Note: A piezo tip/tilt platform: Structure, kinematics, and experiments

Du, Zhijiang; Su, Yu-Chen; Yang, Wen; Dong, Wei

doi:10.1063/1.4870062

Cited by 5 publications

(2 citation statements)

References 10 publications

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“…generally less than 1 . [6][7][8][9][10][11] In order to realize a wider range of travel, the tiptilt stages driven using VCAs have been developed. 1,[12][13][14][15] However, in conventional tip-tilt stages driven using the VCAs, it is necessary that the size of the air gap of the VCA is larger than the transverse displacement of the coil.…”

Section: Introductionmentioning

confidence: 99%

Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range

Chen

Ding

Zhu

et al. 2018

Proceedings of the Institution of Mechanical Engineers, Part C:

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In compliant tip-tilt-piston micropositioning stages, it is difficult to achieve a large rotation range using small air–gap voice coil actuators. With a smaller air gap, the voice coil actuators can produce a larger output force; however, the coil of the voice coil actuator touches the stator as the stage rotates. This paper presents the mechanical design, modeling and experimental tests of a novel large-angle tip-tilt-piston stage driven using four small air-gap voice coil actuators. In order to prevent the occurrence of undesired contact between the coil and stator, a compliant decoupling mechanism is introduced to minimize the transverse displacement of the coil of the voice coil actuator. An improved substructure method based on the compliance matrix is applied to calculate the rotational stiffness of the stage and transverse displacement of the coil. Lagrange’s equation is used to obtain the dynamic resonant frequencies. Based on this, an optimization procedure is proposed for determining the design parameters of the stage. The finite element analysis is performed to verify the theoretical calculation. Finally, a prototype of the stage is fabricated, and experiments are conducted to validate the feasibility of the stage. The proposed stage can achieve rotational–motion strokes of 83.18 mrad and 82.26 mrad in the working axes, for which the rotational mode frequencies are 55.45 Hz and 56.09 Hz, respectively. The motion resolution of the stage is ±6.67 μrad. The maximum transverse displacement of the coil of the voice coil actuator is 10.98 µm, which is negligible as compared to the air gap (0.38 mm) of the voice coil actuator. In summary, a tip-tilt-piston stage was designed to achieve a large rotation range using small-air-gap voice coil actuators.

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Section: Introductionmentioning

confidence: 99%

Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range

Chen

Ding

Zhu

et al. 2018

Proceedings of the Institution of Mechanical Engineers, Part C:

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show abstract

“…For instance, in some optical systems, the tip-tilt mechanism is used to control the orientation with high precision. [6][7][8][9] The usual robot precision modelings which are presented in the ISO 10 and ANSI 11 Standards distinguish between repeatability and accuracy, whose definitions will be described in Section 2.…”

Section: Introductionmentioning

confidence: 99%

Design of an XY-theta platform held by a planar manipulator with four revolute joints and evaluation of its precision performances

Hijazi¹,

Brethé²,

Lefebvre³

2015

Robotica

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SUMMARYThis paper is about the precision performance evaluation of an XY-theta platform, with a patented kinematic design. Indeed, this platform is held by a serial redundant robot arm actuated with four revolute joints. The platform offers a wide 300 × 300 mm workspace, whereas the whole mechanism is extremely compact. Any workpiece on the platform can be positioned under a vertical axis to be grasped or manufactured in a two-step approach: in a coarse positioning mode, the four revolute joints are controlled to position and orientate the workpiece with a position error of less than 10 μm; in a fine positioning mode, two revolute joints are mechanically blocked while two others are controlled to reduce the final error to below 2 μm. The mechanism design and the choice of the blocked and moving joints are optimized to enhance the positioning performances in the two-step positioning method. In this paper, the platform positioning repeatability and its spatial resolution are characterized with the help of a camera. The advantage of this method is that it avoids any mechanical contact and can be implemented easily. Then, these results are compared to our previous precision performance evaluation obtained with the stationary cube method. Finally, the positioning repeatability is estimated at 6.5 μm in the coarse positioning mode and 1.4 μm in the fine positioning mode. Between the coarse and fine mode, the repeatability is thus improved by the factor of four, as predicted by the theory.

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Development and analysis of a bridge-lever-type displacement amplifier based on hybrid flexure hinges

Dong

Chen

Gao

et al. 2018

Precision Engineering

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Note: A piezo tip/tilt platform: Structure, kinematics, and experiments

Cited by 5 publications

References 10 publications

Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range

Design and modeling of a compliant tip-tilt-piston micropositioning stage with a large rotation range

Design of an XY-theta platform held by a planar manipulator with four revolute joints and evaluation of its precision performances

Development and analysis of a bridge-lever-type displacement amplifier based on hybrid flexure hinges

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