Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy

Fowler, Anthony; Maroufi, Mohammad; Moheimani, S. O. Reza

doi:10.1063/1.4918729

Cited by 6 publications

(2 citation statements)

References 11 publications

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“…In [31], we introduced a microfabricated probe scanner, which demonstrated a novel SOI-MEMS approach to designing an on-chip AFM. The device used electrostatic combfinger actuators to laterally position a stage containing an integrated silicon cantilever.…”

Section: Introductionmentioning

confidence: 99%

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach

Ruppert

Fowler

Maroufi

et al. 2017

J. Microelectromech. Syst.

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The atomic force microscope (AFM) is an invaluable scientific tool, however its conventional implementation as a relatively costly macroscale system is a barrier to its more widespread use. A microelectromechanical systems (MEMS) approach to AFM design has the potential to significantly reduce the cost and complexity of the AFM, expanding its utility beyond current applications. This paper presents an on-chip AFM based on a silicon-on-insulator MEMS fabrication process. The device features integrated xy electrostatic actuators and electrothermal sensors as well as an AlN piezoelectric layer for out-of-plane actuation and integrated deflection sensing of a microcantilever. The 3-degree-of-freedom design allows the probe scanner to obtain topographic tapping-mode AFM images with an imaging range of up to 8µm × 8µm in closed loop.

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Section: Introductionmentioning

confidence: 99%

On-Chip Dynamic Mode Atomic Force Microscopy: A Silicon-on-Insulator MEMS Approach

Ruppert

Fowler

Maroufi

et al. 2017

J. Microelectromech. Syst.

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“…This paper introduces a MEMS probe scanner that represents a novel SOI-MEMS implementation of an on-chip AFM. Building on previous work [14], the device uses electrostatic actuators to position a central stage along the X and Y directions. The implementation of electrothermal displacement sensors allows for closed-loop position control of the stage.…”

Section: Introductionmentioning

confidence: 99%

Design and control of a single-chip SOI-MEMS atomic force microscope

Maroufi

Ruppert

Fowler

et al. 2017

2017 American Control Conference (ACC)

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This paper presents a novel microelectromechanical systems (MEMS) implementation of an on-chip atomic force microscope (AFM), fabricated using a silicon-on-insulator process. The device features an XY scanner with electrostatic actuators and electrothermal sensors, as well as an integrated silicon microcantilever. A single AlN piezoelectric electrode is used for simultaneous actuation and deflection sensing of the cantilever via a charge sensing technique. With the device being operated in closed loop, the probe scanner is successfully used to obtain 8 µm × 8 µm tapping-mode AFM images of a calibration grating.

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