Note: An asymmetric flexure mechanism for comb-drive actuators

Olfatnia, Mohammad; Sood, Siddharth; Awtar, Shorya

doi:10.1063/1.4767242

Cited by 14 publications

(6 citation statements)

References 7 publications

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“…It must resist pull-in effects via the DP axial stiffness (y-axis), over a range of displacements, so this large displacement axial stiffness reduction is of direct concern to device performance. This has been a common focus for bearing designers [3]- [6], [14].…”

Section: Double Parallelogram Flexure Bearingmentioning

confidence: 99%

“…This work will accelerate the adoption of UE linkages into DP bearings, as designers can now quickly analyze the tradeoffs associated with their use, even for large displacement applications. This offers the potential for improving bearing performance via reduced error motion, improved dynamics and greater bearing stiffness for a range of applications including their use as MEMS [5], [6], [19]- [27], single-/multi-axis precision positioning stages [19], [28]- [32], and macroscale bearings [8], [33]- [35].…”

Section: Introductionmentioning

confidence: 99%

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Large displacement behavior of double parallelogram flexure mechanisms with underconstraint eliminators

Panas

2016

Precision Engineering

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This paper presents a new analytical method for predicting the large displacement behavior of flexural double parallelogram (DP) bearings with underconstraint eliminator (UE) linkages. This closed-form perturbative Euler analysis method is able to-for the first time-directly incorporate the elastomechanics of a discrete UE linkage, which is a hybrid flexure element that is linked to ground as well as both stages on the bearing. The models are used to understand a nested linkage UE design, however the method is extensible to other UE linkages. Design rules and figures-of-merit are extracted from the analysis models, which provide powerful tools for accelerating the design process. The models, rules and figures-of-merit enable the rapid design of a UE for a desired large displacement behavior, as well as providing a means for determining the limits of UE and DP structures. This will aid in the adoption of UE linkages into DP bearings for precision mechanisms. Models are generated for a nested linkage UE design, and the performance of this DP with UE structure is compared to a DP-only bearing. The perturbative Euler analysis is shown to match existing theories for DP-only bearings with distributed compliance within ≈2%, and Finite Element Analysis for the DP with UE bearings within an average 10%.

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Section: Double Parallelogram Flexure Bearingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Large displacement behavior of double parallelogram flexure mechanisms with underconstraint eliminators

Panas

2016

Precision Engineering

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“…Compliant mechanisms are mechanical mechanisms that rely on the elastic deformation of materials and, among other uses, have been widely applied in medical devices [1][2][3], precision instruments [4][5][6], sensors [7][8][9], and microelectronic-mechanical systems (MEMS) [10,11]. Compliant mechanisms can be divided into centralized and distributed compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

A New Nonlinear Spatial Compliance Model Method for Flexure Leaf Springs with Large Width-to-Length Ratio under Large Deformation

Zhang

Pan

et al. 2022

Micromachines

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Flexure leaf spring (FLS) with large deformation is the basic unit of compliant mechanisms with large stroke. The stiffness along the non-working directions of FLSs with large width-to-length ratio (w/L) is high. The motion stability of the compliant mechanism based on this type of FLS is high. When this type of FLS is loaded along the width direction, the shear deformation needs to be characterized. Nevertheless, currently available compliance modeling methods for FLS are established based on Euler–Bernoulli beam model and cannot be used to characterize shear models. Therefore, these methods are not applicable in this case. In this paper, a new six-DOF compliance model for FLSs with large w/L is established under large deformation. The shear deformation along the width direction model is characterized based on the Timoshenko beam theory. The new constraint model and differential equations are established to obtain a high-precision compliance model expression for this type of FLS. The effects of structural parameters on the compliance of the FLS are analyzed. Finally, the accuracy of the model is verified both experimentally and by finite element simulation. The relative error between theoretical result and experiment result is less than 5%.

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“…So, for providing constrained motion guidance in these dimensions, employing compliant mechanisms may be the only available option. As instances of micron size flexures, one can point to the works of Awtar and co‐workers in which they demonstrated novel double parallelogram–tilted‐beam double parallelogram (DP‐TDP), 29 clamped paired double parallelogram (C‐DP‐DP) 30 and XY 31 flexure mechanisms that enabled large stroke in electrostatic comb‐drive actuators. In all these works, the theoretical findings were based on the classical elasticity theory.…”

Section: Introductionmentioning

confidence: 99%

A modified strain gradient beam constraint model

Arhami

Moeenfard

2022

Math Methods in App Sciences

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The objective of the present paper is to develop a modified strain gradient beam constraint model (MSGBCM) to improve the modeling accuracy of small‐scale compliant mechanisms. First, a simple nano/micro flexure beam under the effect of end loads is considered. The virtual work principle is employed to formulate the nonlinear load–displacement behavior of the system, based on the modified strain gradient theory. It is observed that as the size of the structure becomes smaller, the elements of the elastic stiffness and load stiffening matrices severely deviate from their corresponding values in the beam constraint model (BCM). A closed‐form nonlinear strain energy expression is also derived for nano/micro flexure beams in terms of their tip displacements. This energy expression is utilized to model the nonlinear load–displacement relationships of small‐scale parallelogram (P) flexures. Moreover, analytical formulas are derived for the axial, transverse, and rotational stiffness values of P‐flexures. The most important observation is that in the small‐scale P‐flexures, the axial stiffness loss of small‐scale P‐flexures resulted from the movement of the stage in the transverse direction, may be seriously overestimated by BCM. The developed MSGBCM can be easily extended for investigating the static and dynamic behavior of more complicated micron and submicron size flexures.

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Note: An asymmetric flexure mechanism for comb-drive actuators

Cited by 14 publications

References 7 publications

Large displacement behavior of double parallelogram flexure mechanisms with underconstraint eliminators

Large displacement behavior of double parallelogram flexure mechanisms with underconstraint eliminators

A New Nonlinear Spatial Compliance Model Method for Flexure Leaf Springs with Large Width-to-Length Ratio under Large Deformation

A modified strain gradient beam constraint model

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