2012
DOI: 10.1007/s00542-012-1452-x
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Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing

Abstract: This paper reports on the potential of microelectrical discharge machining (lEDM) as an innovative method for the fabrication of 3D microdevices. To demonstrate the wide capabilities of lEDM two different microsystems-a microfluidic device for the dispersion of nanoparticles and a star probe for microcoordinate metrology-are presented. To gain optimized process conditions as well as a high surface quality an adequate adaption of the single erosion parameters such as energy, pulse frequency and spark gap has to… Show more

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Cited by 30 publications
(7 citation statements)
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“…Homogenization of the pre‐emulsion was performed in a customized microchannel high‐pressure emulsification setup as described in previous work . In brief, the sample was processed three cycles at a pressure drop of 1250 bar through a consecutive double orifice microsystem (depth: 50 µm; orifice widths: 80 µm; orifice length: 300 µm; inter‐orifice distance: 5169 µm) made of stainless steel . Afterwards, the sample was allowed to cool to ambient conditions, if applicable.…”
Section: Methodsmentioning
confidence: 99%
“…Homogenization of the pre‐emulsion was performed in a customized microchannel high‐pressure emulsification setup as described in previous work . In brief, the sample was processed three cycles at a pressure drop of 1250 bar through a consecutive double orifice microsystem (depth: 50 µm; orifice widths: 80 µm; orifice length: 300 µm; inter‐orifice distance: 5169 µm) made of stainless steel . Afterwards, the sample was allowed to cool to ambient conditions, if applicable.…”
Section: Methodsmentioning
confidence: 99%
“…Styli with ruby spheres of diameters between 300 µm and 120 µm are commercially available. Styli with tips down to 50 µm diameter can be produced using wire electro-discharge grinding (using SX200 from Sarix) as detailed in [23,29].…”
Section: Fabrication and Assemblymentioning
confidence: 99%
“…The combination of a microprobe and a GMI has made possible for measuring geometries with a small tip diameter down to 50 µm [23,29]. In the first part of this work, the microprobe, its working principle, its production and its new assembly, and its properties are presented.…”
Section: Introductionmentioning
confidence: 99%
“…Micro-EDM has small macro cutting force and can process a variety of super-hard and brittle material. Due to these advantages, scholars have applied micro-EDM for processing 3D micro-cavity molds [1][2][3], micro-parts [4][5][6], and micro-holes [7][8][9].…”
Section: Introductionmentioning
confidence: 99%