Novel Airflow Sensor Using Laser Heated Sn-Microsphere Airgap Fiber Fabry–Pérot Interferometer

Lee, Cheng‐Ling; Yang, Chung-Xian; Liang, Teng-Yu; Ma, Chao-Tsung

doi:10.1109/lpt.2019.2946595

Cited by 8 publications

(1 citation statement)

References 19 publications

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“…Recently, optical airflow sensors based on fiber optics have attracted substantial research interest due to their distinctive advantages, such as their lightweight, high sensitivity, and fast optical response 20 , 21 . To improve the sensitivity of sensors to optical changes induced by airflow, several advanced architectures, such as fiber Bragg gratings 22 , 23 , Fabry–Pérot interferometers 24 , 25 , microcantilevers 26 , and other nanostructures 27 , have been incorporated. Nevertheless, the reported fiber-optic sensing systems mostly involve the complex assembly of external components and require precise optical alignment to couple the light from a light source to a spectroscopic analyzer through optical fiber as the sensing medium.…”

Section: Introductionmentioning

confidence: 99%

Chip-scale optical airflow sensor

Luo

Liang

et al. 2022

Microsyst Nanoeng

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Airflow sensors are an essential component in a wide range of industrial, biomedical, and environmental applications. The development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly desirable. Herein, we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS membrane. The compact GaN chip is responsible for light emission and photodetection. The PDMS membrane fabricated using a droplet-based molding process can effectively transform the airflow stimuli into optical reflectance changes that can be monitored by an on-chip photodetector. Without the use of external components for light coupling, the proposed sensor adopting the novel integration scheme is capable of detecting airflow rates of up to 53.5 ms−1 and exhibits a fast response time of 12 ms, holding great promise for diverse practical applications. The potential use in monitoring human breathing is also demonstrated.

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