Novel architecture for measurements in resistive MEMS sensors

Abstract

A low voltage, low power, resistive sensor architecture is proposed in this paper. The architecture is novel as it enhances the sensitivity along the main axis as well as reducing the impact of cross axes components. The proposed scheme also allows the simultaneous measurement of sensitivity along six different axes. With less than 15% of the power of its Wheatstone bridge [1] counterpart and with a voltage level as low as 2.25 V, this architecture also enables the realization of the sensor using fewer resistive elements. The modified sensor structure, along with the front-end signal processing circuit, is discussed.

Enabling Distributed Intelligence with Ferroelectric Multifunctionalities

“…An accelerometer for vibration measurement can be used as an example to explain this point. Besides piezoelectric effect, accelerometers are also produced from capacitive or resistive effects, in which the sensing principle is based on the changes of capacitance [ 25 ] or resistance [ 26 ] in response to the vibration. In these two cases, an electric bias is usually required to determine the capacitance and resistance changes, which means an external energy source is necessary according to the basic operation principle.…”