Novel auto‐photosensitive polyimides with tailored properties

Rohde, Ottmar; Smolka, Paul; Falcigno, Pasquale A.; Pfeifer, Josef

doi:10.1002/pen.760322115

Cited by 27 publications

(12 citation statements)

References 10 publications

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“…The relationships between photosensitivity and chemical structure of ortho-alkyl substituted polyimides was investigated in a more quantitative way by Rohde et al 50 with a series of homopolymers and copolymers having a weight average molecular weight eM w) in the range 30 000 to 45 000. Their experimental results led to the conclusion that photosensitivity is proportional to if wand approximately proportional to the square of inherent viscosity (l1inW.…”

Section: Negative Tone Polymersmentioning

confidence: 99%

Heterocyclic polymers with high glass transition temperatures

Sillion¹,

Rabilloud²

1995

New Methods of Polymer Synthesis

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Glass transition temperatures (Tgs) of polymers have been correlated with the concept of free volume so that the relationship between Tg and the molecular mass M (7.1) where T; is the glass transItIon temperature for infinite molecular weight, K is a constant and M is the molecular weight. This relation is understandable if one considers that the fractional free volume due to the chain ends decreases as the molecular weight increases. Assuming that molecular motion of a chain end is greater than for an internal part of the chain, a low molecular weight polymer will have a Tg lower than a corresponding high molecular weight polymer. The constant K is the contribution of the end-groups (7.2) where p is the polymer density, N A is Avogadro's number, e is the contribution of a chain end to the free volume and a[ is the thermal expansion coefficient of the free volume.A few long branches on a polymer backbone decrease Tg by increasing the number of chain ends, while regular short branching along the chain increases both the stiffness and Tg and decreases chain mobility. Crosslinking reduces the specific volume so that Tg rises as a consequence of the reduction in molecular motion. l For homo cyclic and heterocyclic aromatic polymers, structure-property relationships have been reviewed mainly for polyimides and some general features have been pointed out. In the case of aromatic substitution, meta-versus para-catenation decreases Tg and flexible bridging groups such as oxygen or methylene decrease Tg more than do highly dipolar groups such as carbonyl and sulfone. Bulky substituents or substituents which restrict free rotation between two phenyl rings also increase Tg• 2 ,3 Aromatic and heterocyclic high performance polymers are very often amorphous and the variation in properties is governed by Tg• J. R. Ebdon et al. (eds.), New Methods of Polymer Synthesis

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Section: Negative Tone Polymersmentioning

confidence: 99%

Heterocyclic polymers with high glass transition temperatures

Sillion¹,

Rabilloud²

1995

New Methods of Polymer Synthesis

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“…The adhesion between the photoresist and the substrate is fairly poor and requires rigorous conditions for the temperature, humidity, and the substrate surface. [5][6][7][8][9] In order to modify these disadvantages, we introduced some siloxane structure into the main chain of the auto-photosensitive PSPI.…”

Section: Introductionmentioning

confidence: 99%

Modification of negative auto-photosensitive polyimide

Li¹,

Li²,

Zhu³

2000

J. Appl. Polym. Sci.

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This article describes the preparation of a kind of auto-photosensitive polyimide (PSPI) that contains organo-silicone moiety in its main chain. A group of novel auto-photosensitive polyimides were prepared based on the aromatic diamine monomers and 3,3Ј,5,5Ј-benzophenontetracarboxylic dianhydride (BTDA) by the method of solution polycondensation at room temperature and imidized at a high temperature. The properties of PSPIs, such as ultraviolet (UV) absorption, electric and adhesion properties, and moisture absorption, were characterized by UV analysis, a dielectric constant detector, and so on. The relationship between the structure and properties of PSPIs is discussed.

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“…Photosensitive polyimides (PSPIs), because of their excellent combined physical and chemical features and easy processing characteristics, have been extensively employed in advanced microelectronics packaging as interlayer dielectrics in multilayer structures and dielectric multichip modules, passivation layers and α‐particle barriers on chips, stress relief buffer coatings in high‐density electronic packaging, and so forth 1–9. PSPIs, in the negative photoimaged mode, are usually formulated from poly(amic acid)s (PAAs), which contain photosensitive crosslinking sites in polymer backbones introduced either by chemical bonding or by saltlike linking 10–12. Their major drawbacks for advanced microelectronics applications include the heavy dimensional shrinkage and deteriorated mechanical properties of the thermally cured polyimide photopatterns caused by the significant evolution of organic volatiles derived from the photosensitive additives and solvents.…”

Section: Introductionmentioning

confidence: 99%

Photoimageable polyimides derived from α,α‐(4‐amino‐3,5‐dimethylphenyl)phenylmethane and aromatic dianhydride

Qian

Pang

et al. 2002

J. Polym. Sci. A Polym. Chem.

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Soluble and inherent photoimageable polyimides with improved photopatterning features were prepared from α,α‐(4‐amino‐3,5‐dimethylphenyl)phenylmethane and 3,3′,4,4′‐benzophenonetetracarboxylic dianhydride. The polyimides possessed good combined chemical and physical properties: thermal stability was observed, with an initial thermal decomposition temperature of 565 °C and a high glass‐transition temperature of 318 °C. Homogeneous polyimide solutions in common organic solvents with solid contents as high as 20 wt % were prepared. These solutions had a shelf life greater than 3 months. The polyimides had high electric insulating properties and low dielectric constants and dissipation factors. Fine patterns were processed by direct exposure of the polyimide coatings to UV i‐line, followed by development with an organic developer. © 2002 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 40: 3012–3020, 2002

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Novel auto‐photosensitive polyimides with tailored properties

Cited by 27 publications

References 10 publications

Heterocyclic polymers with high glass transition temperatures

Heterocyclic polymers with high glass transition temperatures

Modification of negative auto-photosensitive polyimide

Photoimageable polyimides derived from α,α‐(4‐amino‐3,5‐dimethylphenyl)phenylmethane and aromatic dianhydride

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