Studied were cluster-size dependence of catalytic activity of CO oxidation driven by unisized platinum clusters, Pt N (N = 10, 30, and 60), directly bound to a silicon substrate surface. Temperature-programmed desorption measurements were repeated for a given Pt N /Si catalyst with systematic change of the reaction condition. The CO oxidation on the Pt N /Si catalyst is described in a manner similar to the bulk Pt(111) surface; the Langmuir−Hinshelwood mechanism by molecular oxygen activated by the catalyst at 120−140 K (α reaction) and the dissociatively adsorbed atomic oxygen in the temperature range of 130−350 K (β reaction). However, the Pt N /Si catalyst has the advantage of a lower-temperature activity compared with the bulk Pt(111) surface. Furthermore, the Pt 60 /Si catalyst has 1.5 times higher activity per Pt atom than Pt 30 /Si, while no catalytic activity for the Pt 10 /Si sample. These results are interpreted in relation to the geometric structure and the electron accumulation of the Pt clusters on the Si surface.