Novel chip-scale high-Q whispering gallery mode resonator as a magnetometer

Freeman, Eugene; Wang, Chengyu; Sumaria, Vedant; Zhang, Chenchen; Cocking, Alexander; Liu, Zhiwen; Tadigadapa, Srinivas

doi:10.1109/icsens.2017.8233893

Cited by 3 publications

(1 citation statement)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…More specifically, the bubbles are realized through bonding of a silicon and a borosilicate glass wafer with air cavities at the place of the microbubbles which are inflated afterwards in a vacuum oven at 775 °C. Potential applications are nanoliter liquid sensing, e.g., for bioanalyte detection and lab-on-a-chip applications [125], [126] or high-resolution magnetometers [127].…”

Section: B Resonators Filters and Phase Shiftersmentioning

confidence: 99%

RF Glass Technology Is Going Mainstream: Review and Future Applications

Chaloun¹,

Brandl²,

Ambrosius³

et al. 2023

IEEE J. Microw.

View full text Add to dashboard Cite

Driven by the increasing demand for high-throughput communication links and high-resolution radar sensors, the development of future wireless systems pushes at ever greater operating frequencies. By analogy, high-performance computing (HPC) systems with high-bandwidth I/Os have become a mainstream solution to address multi Gbit/s data rates. Heterogeneous integration technologies play a vital role here in enhancing the performance and functional density, along with reducing the size and costs of such RF systems. In line with this trend, many passive components, which have once been monolithically integrated, are now implemented on ceramic or polymer-based packages. Besides these long-established material and process technologies, considerable efforts have also recently been devoted to the development of RF components on glass and glass-ceramics. Spurred by their low dielectric losses, extremely smooth surfaces, and excellent dimensional stability, glass technologies are emerging as a promising alternative for high-volume and high-performance RF applications. In this article, relevant glass materials and key enabling technologies are reviewed and put into context with well-established RF substrate technologies. Another focus is set on the latest glass-based packaging and interposer solutions ranging from MHz-to-THz frequencies. To showcase the development activities and practical accomplishments of the RF glass technology, also a large variety of key components is presented. Finally, the paper concludes by discussing future research and development directions of RF glass devices.INDEX TERMS MTT 70th Anniversary Special Issue, glass technology, dielectrics, packaging, interposer, system-on-package, interconnects, filters, antennas, antenna-in-package, millimeter wave (mm-wave).

show abstract

Section: B Resonators Filters and Phase Shiftersmentioning

confidence: 99%

RF Glass Technology Is Going Mainstream: Review and Future Applications

Chaloun¹,

Brandl²,

Ambrosius³

et al. 2023

IEEE J. Microw.

View full text Add to dashboard Cite

show abstract

On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators

Zhang

Cocking

Freeman

et al. 2017

Sci Rep

Self Cite

View full text Add to dashboard Cite

Arrays of on-chip spherical glass shells of hundreds of micrometers in diameter with ultra-smooth surfaces and sub-micrometer wall thicknesses have been fabricated and have been shown to sustain optical resonance modes with high Q-factors of greater than 50 million. The resonators exhibit temperature sensitivity of −1.8 GHz K−1 and can be configured as ultra-high sensitivity thermal sensors for a broad range of applications. By virtue of the geometry’s strong light-matter interaction, the inner surface provides an excellent on-chip sensing platform that truly opens up the possibility for reproducible, chip scale, ultra-high sensitivity microfluidic sensor arrays. As a proof of concept we demonstrate the sensitivity of the resonance frequency as water is filled inside the microspherical shell and is allowed to evaporate. By COMSOL modeling, the dependence of this interaction on glass shell thickness is elucidated and the experimentally measured sensitivities for two different shell thicknesses are explained.

show abstract

Optical magnetic sensing using whispering-gallery mode optomagnonical cavity

Pang

Gao

et al. 2020

IEEE Sensors J.

View full text Add to dashboard Cite

Novel chip-scale high-Q whispering gallery mode resonator as a magnetometer

Cited by 3 publications

References 10 publications

RF Glass Technology Is Going Mainstream: Review and Future Applications

RF Glass Technology Is Going Mainstream: Review and Future Applications

On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators

Optical magnetic sensing using whispering-gallery mode optomagnonical cavity

Contact Info

Product

Resources

About