Novel Designs for Application Specific MEMS Pressure Sensors

Abstract

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.

Bio-Inspired Stretchable Absolute Pressure Sensor Network

“…In terms of transducer mechanisms, both piezoresistive and capacitive sensing approaches can be used on the stretchable absolute pressure sensor network. Table 1 lists characteristic performance metrics for comparison between piezoresistive and capacitive sensing mechanisms [ 13 , 18 , 19 , 20 ]. Compared with capacitive sensing, piezoresistive mechanism has three advantages when applied to stretchable absolute pressure sensor networks: excellent linearity, simple interface electronics, and low cost.…”

“…Micro Electro-Mechanical System (MEMS) sensors with piezoresistive and capacitive pressure sensing mechanisms have been widely explored in previous studies, not only on rigid silicon wafers but different flexible substrates as well [ 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Although high sensitivity can be achieved in traditional MEMS pressure sensors, those sensors, generally built on rigid silicon substrates, do not feature useful stretchability and flexibility.…”

Temporally Transitional Cross-Sectional Capacitance Measurement of Micro Particle Concentration in the Microchannel

“…This condition would contribute to the stray capacitance effect. Moreover, the undesirable stray capacitance effect could come from the electrical circuit and wires measurement system [10].…”

“…11 shows an example of the relationship of the particle volume fraction with the cross-sectional capacitance measurement at the adjacent electrode pair 1-2. The horizontal axis is the calculation of the particle volume fraction, and the vertical axis is the 39 (5-6) 52 (7)(8) 57 (8-9) 64 (10)(11) 66 (11)(12) 9 to calculate the particle volume fraction based on the cross-sectional capacitance measurement and the permittivity distribution. The Maxwell model is derived from the self-consistent model by solving the Laplace equation.…”

Novel Optical MEMS Pressure Sensor Based on Tilted Gratings

“…The complete mathematical description is provided by Zaho and Mang [1]. [3] , have neglected temperature related measurement errors. Giulio et.…”