1999
DOI: 10.2494/photopolymer.12.695
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Novel Diffusion Analysis in Advanced Chemically Amplified DUV Resists Using Photometric Methods.

Abstract: The demand for smaller device dimensions in microlithography drives the need to understand and control diffusion during photoresist processing. In advanced chemically amplified systems the lithographic performance is strongly influenced by diffusion of acid and base additives. Photoacid generation efficiencies and diffusion parameters were quantitatively evaluated using an established in situ photometric method employing a pH-sensitive organic dye. [ 1-3 ] A kinetic model for the post-exposure bake (PEB) has b… Show more

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Cited by 7 publications
(5 citation statements)
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“…6,[11][12][13][14][15][16][17] However, the positions and shapes of these spectra generally depend on the chemical composition of the host matrix. 6,[11][12][13][14][15][16][17] However, the positions and shapes of these spectra generally depend on the chemical composition of the host matrix.…”
Section: Methodsmentioning
confidence: 99%
“…6,[11][12][13][14][15][16][17] However, the positions and shapes of these spectra generally depend on the chemical composition of the host matrix. 6,[11][12][13][14][15][16][17] However, the positions and shapes of these spectra generally depend on the chemical composition of the host matrix.…”
Section: Methodsmentioning
confidence: 99%
“…43 Further, alteration of dye absorption parameters can result from chemical or thermal stimuli. 44,45 Due to the nature of FLaSk of dye doped systems, it is of critical importance that these effects can be taken into consideration. In the case of the employed IR-140 dye, while stable in solution with SU-8, the IR-140 both inhibited the SU-8 photochemistry and at the same time, lost much of its NIR absorption.…”
Section: Experimental Realization Of Flaskmentioning
confidence: 99%
“…The diffusion constant can be obtained by comparison between simulated and measured profiles, by photometric methods [11] or by radioactive marking. These measurements are not very accurate at all.…”
Section: Resist Modelsmentioning
confidence: 99%