Novel end-fly-cutting-servo system for deterministic generation of hierarchical micro–nanostructures

Abstract

This paper reports on the diamond cutting based generation of hierarchical micronanostructures, which are conventionally difficult for both mechanical and non-mechanical methods to achieve. A novel end-fly-cutting-servo (EFCS) system, with four-axis servo motions that combine the concepts of fast/slow tool servo and endface fly-cutting, is proposed and investigated. In the EFCS system, an intricately shaped primary surface is generated by material removal, while the desired secondary nanostructures are simultaneously constructed using residual tool marks by actively controlling tool loci. The potential of the EFCS system is demonstrated firstly by fabricating a nanostructured F-theta freeform surface and a nanostructured micro-aspheric array.

Hierarchical-information-based characterization of multiscale structured surfaces

“…Multiscale structured surfaces (MSSs), such as microlens arrays [1], micro-pyramids [2] and sinusoidal micro-structures [3], are playing an important role in advanced optics [4] and bio-inspired applications [5]. Small-scale structured patterns are embedded in large-scale flat or curved substrates using multiscale surface design processes, where the different scales of geometry have different functions.…”

“…Small-scale structured patterns are embedded in large-scale flat or curved substrates using multiscale surface design processes, where the different scales of geometry have different functions. Whilst methods for machining of MSSs have been explored [1,2], only qualitative methods for their characterization have been applied [2], or the surface is characterized without separating out the different scale geometries [1].…”

Nanomanufacturing—Perspective and applications

“…For instance, multi-scale surfaces and biomimetic surfaces have been machined by the end-fly-cutting-servo method [201]. One type of ellipsoid micro-aspheric array with nanopyramids was manufactured with a mean height of 395 nm and standard deviation of 15 nm [201]. However, the efficiency of these methods are mostly determined by the accuracy of machining compared with the polishing technique [59].…”

“…Moreover, it can rough out large volumes of material quite rapidly. For instance, multi-scale surfaces and biomimetic surfaces have been machined by the end-fly-cutting-servo method [201]. One type of ellipsoid micro-aspheric array with nanopyramids was manufactured with a mean height of 395 nm and standard deviation of 15 nm [201].…”

“…2. The related CIRP keynote papers on other technologies, such as laser machining, finishing technology, and mold manufacturing, have been reported in the reference list [5,61,89,91,201].…”