Novel Fabrication of Full Parylene-Isolated Neuroprobes

Lu, Pen-Li; Fan, Chu-Lin; Yang, Lung‐Jieh; Lin, Chii‐Wann; Jaw, Fu‐Shan

doi:10.1166/jbns.2009.1001

Cited by 2 publications

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“…It is a chemically stable, USP (United States Pharmacopeia) Class VI biocompatible, and flexible material that has been widely implemented in microfluidics and bioMEMS applications such as microvalves [ 1 ], accelerometers [ 2 ], flexible electrodes [ 3 , 4 ], and neural probes [ 5 , 6 , 7 ]. To pattern the Parylene C, different fabrication techniques have been proposed, such as wet etching using chloronapthelene or benzoyl benzoate [ 8 ], dry etching based on O 2 plasma [ 9 , 10 , 11 , 12 , 13 , 14 , 15 ], thermal imprinting or micro-molding [ 16 , 17 ] and laser micromachining [ 18 , 19 , 20 ]. Among the existing fabrication strategies, the dry etching technique is a relatively clean and effective method that is suitable for batch fabrication of Parylene C microstructures.…”

Section: Introductionmentioning

confidence: 99%

SF6 Optimized O2 Plasma Etching of Parylene C

Zhang

Liu

et al. 2018

Micromachines

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Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility. It has been commonly adopted as a structural material for a variety of microfluidics and bio-MEMS (micro-electro-mechanical system) applications. However, it is still difficult to achieve a controllable Parylene C pattern, especially on film thicker than a couple of micrometers. Here, we proposed an SF6 optimized O2 plasma etching (SOOE) of Parylene C, with titanium as the etching mask. Without the SF6, noticeable nanoforest residuals were found on the O2 plasma etched Parylene C film, which was supposed to arise from the micro-masking effect of the sputtered titanium metal mask. By introducing a 5-sccm SF6 flow, the residuals were effectively removed during the O2 plasma etching. This optimized etching strategy achieved a 10 μm-thick Parylene C etching with the feature size down to 2 μm. The advanced SOOE recipes will further facilitate the controllable fabrication of Parylene C microstructures for broader applications.

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Section: Introductionmentioning

confidence: 99%

SF6 Optimized O2 Plasma Etching of Parylene C

Zhang

Liu

et al. 2018

Micromachines

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“…The strong van der Waals force between the nanofibrils could still cause the collapse. The fibril hill structures were fabricated by a peeling method [37]. The process for fabricating the fibril hills proceeds from the fibril mesh as shown in Fig.…”

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confidence: 99%

Artificial Petal Effect on Nanofibrillar Parylene™ Surface

Tsai

Shih

2012

The Journal of Adhesion

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The hierarchical structure on a rose petal surface achieves a large contact angle with high contact angle hysteresis. Inspired by the petal effect, two types of artificial structures, fibril mesh and fibril microhills, were fabricated and compared with the rose petal surface. The fibril mesh, composed of Parylene TM nanofibrils and underneath capillary structures was fabricated using templateassisted deposition. The fibril microhills were formed by peeling the fibril mesh off. The contact angle and contact angle hysteresis on these two surfaces treated by various surface modifications for enhancing the hydrophobicity were measured. The fabricated surface showed similar wetting behavior to the rose petal which is hydrophobic and sticky to water droplets. The relation between the contact angle and the contact angle hysteresis on the various artificial surfaces and the rose petal were discussed. The qualitative estimations of the contact angle hysteresis for the various artificial surfaces were presented.

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Novel Fabrication of Full Parylene-Isolated Neuroprobes

Cited by 2 publications

References 0 publications

SF6 Optimized O2 Plasma Etching of Parylene C

SF6 Optimized O2 Plasma Etching of Parylene C

Artificial Petal Effect on Nanofibrillar Parylene™ Surface

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