Novel four-point-probe design and nanorobotic dual endeffector strategy for electrical characterization of as-grown SWCNT bundles

Eichhorn, Volkmar; Fatikow, Sergej; Sukas, Özlem Sardan; Hansen, Tony; Bøggild, Peter; Occhipinti, Luigi G.

doi:10.1109/robot.2010.5509952

Cited by 6 publications

(3 citation statements)

References 26 publications

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“…Besides the one or two end-effector nanomanipulation systems mentioned above, increasingly complicated nanomanipulation tasks inside a SEM with multi-manipulators [ 11 , 12 , 13 ] require an operator to simultaneously manipulate more (more than two) joysticks and/or keypads. Such operations pose practical barriers, because it is difficult to synchronize the control of two manipulators using two hands.…”

Section: Introductionmentioning

confidence: 99%

Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM

Ding

Shi

et al. 2018

Sensors

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The maneuvering and electrical characterization of nanotubes inside a scanning electron microscope (SEM) has historically been time-consuming and laborious for operators. Before the development of automated nanomanipulation-enabled techniques for the performance of pick-and-place and characterization of nanoobjects, these functions were still incomplete and largely operated manually. In this paper, a dual-probe nanomanipulation system vision-based feedback was demonstrated to automatically perform 3D nanomanipulation tasks, to investigate the electrical characterization of nanotubes. The XY-position of Atomic Force Microscope (AFM) cantilevers and individual carbon nanotubes (CNTs) were precisely recognized via a series of image processing operations. A coarse-to-fine positioning strategy in the Z-direction was applied through the combination of the sharpness-based depth estimation method and the contact-detection method. The use of nanorobotic magnification-regulated speed aided in improving working efficiency and reliability. Additionally, we proposed automated alignment of manipulator axes by visual tracking the movement trajectory of the end effector. The experimental results indicate the system’s capability for automated measurement electrical characterization of CNTs. Furthermore, the automated nanomanipulation system has the potential to be extended to other nanomanipulation tasks.

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Section: Introductionmentioning

confidence: 99%

Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM

Ding

Shi

et al. 2018

Sensors

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“…In this paper, we demonstrate fully automated nanomanipulation inside an SEM by performing a well-structured nanomanipulation task for probing the electrical properties of individual nanowires. Four-point probe measurement of nanomaterials has been reported using scanning tunneling microscopy inside an SEM [25]- [27], using four-probe devices [28]- [31], and using focused ion beam deposition or electron beam lithography to pattern electrodes [32], [33]. Nonetheless, existing techniques require expensive equipment and lack flexibility; moreover, they all entail tedious trial-and-error manual operation.…”

Section: Introductionmentioning

confidence: 99%

Automated four-point probe measurement of nanowires inside a scanning electron microscope

Zhang

Sun

et al. 2010

2010 IEEE International Conference on Automation Science and Engineering

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Nanomanipulation inside a scanning electron microscope (SEM) has been employed to maneuver and characterize nanomaterials. Despite recent efforts toward automated nanomanipulation, it is still largely conducted manually. In this paper, we demonstrate automated nanomanipulation inside an SEM for a well-structured nanomanipulation task via visual servo control and a vision-based contact-detection method using SEM as a vision sensor. Four-point probe measurement of individual nanowires is achieved automatically by controlling four nanomanipulators with SEM visual feedback. A feedforward controller is incorporated into the control system to improve response time. This technique represents an advance in nanomanipulation inside SEM and can be extended to other nanomanipulation tasks.

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“…Four-point probe measurement of nanomaterials has been reported using scanning tunneling microscopy inside an SEM [25]- [27], using four-probe devices [28]- [31], and using focused ion beam deposition or electron beam lithography to pattern electrodes [32], [33]. Nonetheless, existing techniques require expensive equipment and lack flexibility; moreover, they all entail tedious trial-and-error manual operation.…”

mentioning

confidence: 99%

Automated Four-Point Probe Measurement of Nanowires Inside a Scanning Electron Microscope

Zhang

Sun

et al. 2011

IEEE Trans. Nanotechnology

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Abstract-Nanomanipulation inside a scanning electron microscope (SEM) has been employed to maneuver and characterize nanomaterials. Despite recent efforts toward automated nanomanipulation, it is still largely conducted manually. In this paper, we demonstrate automated nanomanipulation inside an SEM for a well-structured nanomanipulation task via visual servo control and a vision-based contact-detection method using SEM as a vision sensor. Four-point probe measurement of individual nanowires is achieved automatically by controlling four nanomanipulators with SEM visual feedback. A feedforward controller is incorporated into the control system to improve response time. This technique represents an advance in nanomanipulation inside SEM and can be extended to other nanomanipulation tasks.

show abstract

Novel four-point-probe design and nanorobotic dual endeffector strategy for electrical characterization of as-grown SWCNT bundles

Cited by 6 publications

References 26 publications

Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM

Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM

Automated four-point probe measurement of nanowires inside a scanning electron microscope

Automated Four-Point Probe Measurement of Nanowires Inside a Scanning Electron Microscope

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