2012
DOI: 10.1021/ac300307e
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Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing

Abstract: Herein, a nanoporous alumina was fabricated to use as a mold in transforming nanopillar structures onto a thin film polymer by thermal nanoimprint lithography (NIL). The size of the pores was successfully controlled by varying the applied voltages and etching time. These nanoporous structures were transferred to the Cyclo-olefin polymer (COP) film surface from the porous mold by a thermal nanoimprinting process. A plasmonic substrate was fabricated by sputtering a thin layer of gold onto this nanopillar polyme… Show more

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Cited by 40 publications
(57 citation statements)
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“…15 Briey, the porous alumina used as a mould was prepared by anodic aluminium oxidation. The fabrication process has already been described in detail.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…15 Briey, the porous alumina used as a mould was prepared by anodic aluminium oxidation. The fabrication process has already been described in detail.…”
Section: Methodsmentioning
confidence: 99%
“…1-6 A multifunctional array platform with high sensitivity, efficiency, and specicity meets the requirement of most medical clinics or laboratory analysts. 15 We proposed self-ordered anodic alumina oxide (AAO) as a nanostructure mould for nanoimprint to fabricate biosensing substrates at low cost and with large area, size tuning capability, and ease of the anodizing process that may enhance the production and marketability of nanoimprint technology. LSPR is based on the resonant oscillation of conductive electrons in noble metal nanoparticles excited by the light electromagnetic eld.…”
Section: Introductionmentioning
confidence: 99%
“…Self-organized nanoporous AAO mould was prepared for nanopillar structure formation on COP substrate. In this study, the nanoporous AAO mould was fabricated using a two-step anodizing method [39], which has been detailed in our previous reports [22,[40][41][42][43]. High purity aluminum substrate with 4 mm thickness was annealed, parallel grained, acetone sonicated and then strip etched using chromic acid (Wako, Tokyo, Japan) before used.…”
Section: Fabrication Of the Gold Sputtered Plasmonic Substratementioning
confidence: 99%
“…In this chapter, novel fabrication methods of LSPR biosensors based on the thermal nanoimprinting technique and the use of porous alumina molds as described above are introduced (Saito et al 2012 ).…”
Section: Nanoimprint Lithography (Nil)mentioning
confidence: 99%