Novel integrated FBAR sensors: a universal technology platform for bio- and gas-detection

Gabl, R.; Green, E.; Schreiter, Matthias; Feucht, Hans-Dieter; Zeininger, H.; Primig, R.; Pitzer, D.; Eckstein, G.; Wersing, W.

doi:10.1109/icsens.2003.1279132

Cited by 55 publications

(39 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…FBAR employed in silicon-integrated miniaturized gas sensors, have demonstrated high mass sensitivity [7]. The advantages of FBAR sensors over SAW sensors consist in manufacturability (photomask simplicity), low cost, small size, high quality factor, power handling capability, as well as integration with CMOS technology [8].…”

Section: Introductionmentioning

confidence: 99%

Sensitivity Evaluation of the Nanostructure-Enhanced BAW Mass Sensor

Zazerin

Ulianova

Bogdan

et al. 2016

3rd International Conference on Nanotechnologies and Biomedical Engineering

View full text Add to dashboard Cite

Abstract-The general implementation concept of the mass sensor based on membrane bulk acoustic wave resonator with nanostructured sensing layer was presented. The 3-dimensional finite element model of the thin film bulk acoustic wave resonator was built to estimate its sensitivity. It was shown that application of the nanostructured ZnO with large effective surface area provided the 20 times sensitivity increase over the polycrystalline sensing layer. The performance characteristics of the proposed sensor at the appointed conditions were described in details.

show abstract

Section: Introductionmentioning

confidence: 99%

Sensitivity Evaluation of the Nanostructure-Enhanced BAW Mass Sensor

Zazerin

Ulianova

Bogdan

et al. 2016

3rd International Conference on Nanotechnologies and Biomedical Engineering

View full text Add to dashboard Cite

show abstract

“…The first integrated CMOS oscillator using micromachined FBAR piezoelectric resonators was published in [4,5]. Lately there has been interest in applying FBAR oscillators in sensors [6][7][8]. The sensor function has been based on the fact that the frequency of the resonator depends on its mass.…”

Section: Introductionmentioning

confidence: 99%

A low noise 0.9 GHz FBAR clock

Åberg

Ylimaula

Ylilammi

et al. 2007

Analog Integr Circ Sig Process

View full text Add to dashboard Cite

show abstract

“…In the past few years, FBARs on silicon substrates have been considered for filter applications in RF devices (Vale et al, 1990). Gabl et al were the first to considerer FBARs for gravimetric bio-chemical sensing applications (Gabl et al, 2003). They basically function like QCMs; however, unlike QCMs, typical thicknesses for the piezoelectric thin film are between 100 nm and a few μm, allowing FBARs to easily attain resonance frequencies in the GHz range.…”

Section: Fbar Devices For Biosensing Applicationsmentioning

confidence: 99%