Novel low-k polycyanurates for integrated circuit (IC) metallization

Schulze, K.; Schuldt, Ute; Kahle, O.; Schulz, Stefan E.; Uhlig, M.; Uhlig, C.; Dreyer, Cyrus E.; Bauer, Matthew R.; Geßner, Thomas

doi:10.1016/j.mee.2005.07.016

Cited by 11 publications

(9 citation statements)

References 4 publications

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“…In a different study, the molecular mobility in PCN/clay nanocomposites was studied by dielectric technique [19]. Schulze et al [20] reported that co‐curing with monofunctional cyanate ester monomers reduced the dielectric constant and the lowest ε′‐value of 2.54 was obtained with a high content of m‐(triﬂuorom‐ethyl)phenyl structural units [20]. Up to now, dielectrical properties of PCNs prepared from bisphenol dicyanates in the presence of catalysts have been studied very scarcely.…”

Section: Introductionmentioning

confidence: 99%

Preparation, characterization and dielectric properties of polycyanurate films cyclotrimerized in the presence of different catalysts

Gürşen¹,

Yıldırım²,

Deligöz³

2012

Polymer Engineering & Sci

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The article deals with the preparation and characterization of a series of functional polycyanurate (PCN) films obtained from bisphenol E dicyanate (BDECy) by thermal cyclotrimerization in the presence of four different catalysts. Thermal, structural, and dielectrical analyses of PCN films are performed as well as some physical properties such as solubility, adhesion, hardness, and contact angle measurements are studied. Fourier transform infrared spectroscopy results reveal that cyclotrimerized structure is formed from BDECy not only in the presence of catalyst but also free of catalyst. While 55.5% of BDECy is cylotrimerized without catalyst, the conversion of BDECy into triazine significantly increases and reaches to 82.1% and 84.8% for PCNPh1-2 and PCNPh3-2, respectively. Thermogravimetric analysis results reveal that PCN films prepared in the presence of catalyst are thermally stable up to 2408C and exhibit two degradation steps. Dielectric constant and dielectrical breakdown strength of the PCN film cyclotrimerized with 1 wt% phenol as catalyst are found to be 3.16 at 1 MHz and 194 kV/mm, respectively, while the catalystfree PCN film has the dielectric constant of 4.92 at the same frequency. On the other hand, chemical stability, hardness, and adhesion properties of the prepared films are found to be excellent.

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Section: Introductionmentioning

confidence: 99%

Preparation, characterization and dielectric properties of polycyanurate films cyclotrimerized in the presence of different catalysts

Gürşen¹,

Yıldırım²,

Deligöz³

2012

Polymer Engineering & Sci

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“…In the curing reaction three cyanate ester functional groups (-OCN groups) form a triazine ring (trimerization). Due to the high degree of symmetry in the triazine ring, where dipoles associated with the carbon-nitrogen and carbon-oxygen bonds are counterbalanced, polycyanurates have low relative permittivity in general (e.g., ε < 3.2 for trifunctional homopolymer networks) [9]. Dicyclopentadiene (DCPD) is a raw material for low dielectric polymers due to its low polarity and low moisture absorption.…”

Section: Introductionmentioning

confidence: 99%

Mechanical and dielectric properties of epoxy/dicyclopentadiene bisphenol cyanate ester/glass fabric composites

Wang¹,

Liang²,

Yan³

et al. 2008

Express Polym. Lett.

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Abstract. The impact and flexural strengths of epoxy-dicyclopentadiene bisphenol cyanate ester (EP-DCPDCE) hybrid thermoset as well as the interlaminar shear strength (ILSS) and flexural strength of the composites consisting of the hybrid thermoset and glass fabric were studied. It is found that the addition of epoxy resin (EP-51) can improve the mechanical properties, particularly, the impact strength of DCPDCE matrix and the ILSS of glass fabric reinforced composites. The improvements of the mechanical properties were obvious when the content of EP-51 is from 15 to 30 wt%. The investigations of the interphase of composites by scanning electron microscope (SEM) and dynamic mechanical analysis (DMA) confirm the improvement of mechanical properties of the composites. However the addition of EP-51 has negative effects on the thermal and dielectric property of the composites.

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“…Among the systems studied, the Cy-OCN/DGEBA/OAPS systems exhibited lower values of dielectric constant and dielectric loss because of the creation of more free volume during the formation of less polar nature of triazine ring between the epoxy and -OCN. 36,39 In the case of Cy-OCN/DGEBA/OG systems, the values of dielectric constant and dielectric loss were higher due to the presence of the polar nature of hydroxyl group. The values of dielectric constant of 10 wt.% POSS-reinforced systems of Cy-OCN/DGEBA/ OAPS and Cy-OCN/DGEBA/OG were 2.19 and 2.30, respectively.…”

Section: Water Absorption Behaviormentioning

confidence: 99%

Synthesis and characterization of epoxy modified cyanate ester POSS nanocomposites

Chandramohan

Dinkaran

Kumar³

et al. 2012

High Performance Polymers

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Polyhedral oligomeric silsesquioxane (POSS) viz; namely, Octa functional silsesquioxanes [octa amino (OAPS) and octa glycidyl (OG)] reinforced epoxy modified cyanate ester nanocomposites were prepared through intercrosslinked network. The intercrosslinking formation between cyanate ester and POSS was confirmed by Fourier transform infrared spectroscopy. The morphology of nanocomposites was studied using X-ray diffraction, scanning electron microscopy, transmission electron microscopy and atomic force microscopy techniques. The electrical properties of the nanocomposites were evaluated by impedance analyzer. The influences of POSS macromer on the thermal and mechanical properties of epoxy modified cyanate ester nanocomposites were also addressed. The thermogravimetric analysis indicates that the thermal stability of the nanocomposites increases with increasing percentage of both types of POSS macromer. The dielectric constant and dielectric loss are decreased with increasing POSS concentration in the epoxy modified cyanate ester nanocomposites.

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Novel low-k polycyanurates for integrated circuit (IC) metallization

Cited by 11 publications

References 4 publications

Preparation, characterization and dielectric properties of polycyanurate films cyclotrimerized in the presence of different catalysts

Preparation, characterization and dielectric properties of polycyanurate films cyclotrimerized in the presence of different catalysts

Mechanical and dielectric properties of epoxy/dicyclopentadiene bisphenol cyanate ester/glass fabric composites

Synthesis and characterization of epoxy modified cyanate ester POSS nanocomposites

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