Novel micromachined cantilever sensors for scanning near‐field optical microscopy

Münster, Stefan; Werner, S.; Mihalcea, C.; Scholz, W.; Oesterschulze, E.

doi:10.1046/j.1365-2818.1997.00173.x

Cited by 31 publications

(15 citation statements)

References 15 publications

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“…Hollow pyramidal/campanile metallic probes produced by conventional semiconductor fabrication methods were demonstrated in Ref. 88. Also, batch fabrication of Si 3 N 4 tips by plasma enhanced chemical vapor FIG.…”

Section: Aperture Snom Probesmentioning

confidence: 99%

Review of near-field optics and superlenses for sub-diffraction-limited nano-imaging

2016

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Near-field optics and superlenses for imaging beyond Abbe's diffraction limit are reviewed. A comprehensive and contemporary background is given on scanning near-field microscopy and superlensing. Attention is brought to recent research leveraging scanning near-field optical microscopy with superlenses for new nano-imaging capabilities. Future research directions are explored for realizing the goal of low-cost and high-performance sub-diffraction-limited imaging systems. © 2016 Author(s)

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Section: Aperture Snom Probesmentioning

confidence: 99%

Review of near-field optics and superlenses for sub-diffraction-limited nano-imaging

2016

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“…55,56 However, few of the present designs are commercially available or have actually been used in NFO experiments. Therefore, the NFO community still relies heavily on aperture probes based on tapered optical fibers.…”

Section: B Fabrication Of Near-field Optical Probesmentioning

confidence: 99%

“…Microfabricated near-field optical probes 55,56 will help to solve these problems and improve reproducibility by providing better defined experimental conditions. Also, new tip concepts which deviated from the simple aperture scheme may be of advantage.…”

Section: Perspectivesmentioning

confidence: 99%

Scanning near-field optical microscopy with aperture probes: Fundamentals and applications

Hecht

Sick

Wild

et al. 2000

The Journal of Chemical Physics

702

440

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In this review we describe fundamentals of scanning near-field optical microscopy with aperture probes. After the discussion of instrumentation and probe fabrication, aspects of light propagation in metal-coated, tapered optical fibers are considered. This includes transmission properties and field distributions in the vicinity of subwavelength apertures. Furthermore, the near-field optical image formation mechanism is analyzed with special emphasis on potential sources of artifacts. To underline the prospects of the technique, selected applications including amplitude and phase contrast imaging, fluorescence imaging, and Raman spectroscopy, as well as near-field optical desorption, are presented. These examples demonstrate that scanning near-field optical microscopy is no longer an exotic method but has matured into a valuable tool.

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“…There are other probe concepts that have to be noted. First, was the introduction by Oesterschulze et al [38] of the method of a silicon probe with an aperture in the silicon cantilever. Such a probe has to be illuminated with a lens from above and thus cannot be scanned.…”

Section: Cantilevered Nsom Probes For Reflectionmentioning

confidence: 99%

The optical near-field: super-resolution imaging with structural and phase correlation

et al. 2014

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An overview of near-field optics is presented with a focus on the fundamental advances that have been made in the field since its inception 30 years ago. A focus is placed on the advancements that have been achieved in instrumentation. These advances have led to a greater generality of use with ultra-low mechanical and optical noise and the ultimate in force sensitivity with near-field optical probes. An emphasis is placed on the importance of fully integrating near-field optics with other imaging and spectroscopic modalities including Raman spectroscopy and electron/ion beam imaging. Important directions in probe design, force feedback methods and scanner flexibility are described. These developing avenues provide considerable optimism for an ever increasing incorporation of near-field optics to help resolve critical problems in fundamental and applied science.

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Novel micromachined cantilever sensors for scanning near‐field optical microscopy

Cited by 31 publications

References 15 publications

Review of near-field optics and superlenses for sub-diffraction-limited nano-imaging

Review of near-field optics and superlenses for sub-diffraction-limited nano-imaging

Scanning near-field optical microscopy with aperture probes: Fundamentals and applications

The optical near-field: super-resolution imaging with structural and phase correlation

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