Novel Microtensile Method for Monotonic and Cyclic Testing of Freestanding Copper Thin Films

Lin, Ming-Tzer; Tong, Chi-Jia; Shiu, Kai-Shiang

doi:10.1007/s11340-009-9221-1

Cited by 21 publications

(11 citation statements)

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“…Piezoelectric [339,340] and electrostatic [337] external actuators have been used to pull on the films. These testing platforms can be designed to allow cyclic loadings for fatigue analysis, see for instance [341][342][343]. High resolution CCD camera and optical microscope can be adapted to look at the specimens during deformation and, if needed, apply digital image correlation analysis to extract strain fields afterwards.…”

Section: Fracture Testing Methods Of Freestanding Specimensmentioning

confidence: 99%

Failure of metals III: Fracture and fatigue of nanostructured metallic materials

2016

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a b s t r a c tPushing the internal or external dimensions of metallic alloys down to the nanometer scale gives rise to strong materials, though most often at the expense of a low ductility and a low resistance to cracking, with negative impact on the transfer to engineering applications. These characteristics are observed, with some exceptions, in bulk ultra-fine grained and nanocrystalline metals, nano-twinned metals, thin metallic coatings on substrates and freestanding thin metallic films and nanowires. This overview encompasses all these systems to reveal commonalities in the origins of the lack of ductility and fracture resistance, in factors governing fatigue resistance, and in ways to improve properties. After surveying the various processing methods and key deformation mechanisms, we systematically address the current state of the art in terms of plastic localization, damage, static and fatigue cracking, for three classes of systems: (1) bulk ultra-fine grained and nanocrystalline metals, (2) thin metallic films on substrates, and (3) 1D and 2D freestanding micro and nanoscale systems. In doing so, we aim to favour cross-fertilization between progress made in the fields of mechanics of thin films, nanomechanics, fundamental researches in bulk nanocrystalline metals and metallurgy to impart enhanced resistance to fracture and fatigue in high-strength nanostructured systems. This involves exploiting intrinsic mechanisms, e.g. to enhance hardening and rate-sensitivity so as to delay necking, or improve grain-boundary cohesion to resist intergranular cracks or voids. Extrinsic methods can also be utilized such as by hybridizing the metal with another material to delocalize the deformation -as practiced in stretchable electronics. Fatigue crack initiation is in principle improved by a fine structure, but at the expense of larger fatigue crack growth rates. Extrinsic toughening through hybridization allows arresting or bridging cracks. The content and discussions are based on experimental, theoretical and simulation results from the recent literature, and focus is laid on linking microstructure and physical mechanisms to the overall mechanical behavior.

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Section: Fracture Testing Methods Of Freestanding Specimensmentioning

confidence: 99%

Failure of metals III: Fracture and fatigue of nanostructured metallic materials

2016

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“…Freestanding films with submicrometer thickness have yet hardly been investigated, [12][13][14] largely due to the difficult sample handling. As a consequence, their fatigue behavior remains largely unknown.…”

Section: Introductionmentioning

confidence: 99%

Bulge fatigue testing of freestanding and supported gold films

Merle

Göken

2014

J. Mater. Res.

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The bulge test was used to investigate the fatigue properties of gold thin films with a thickness between 100 and 300 nm. The membranes were pressurized at a rate of 0.2 Hz up to 10 5 times, during which their stress and strain states were continuously recorded. Gold films on a silicon nitride substrate were cyclically loaded into tension and compression. Due to the presence of the substrate, no membrane failure was observed, but the residual stress shifted from an initially tensile state to an increasingly compressive one. Typical fatigue damage mechanisms consisting of extrusions were found in some large grains. Freestanding films were cyclically loaded in pure tension until failure occurred. The data acquired during the fatigue tests show a strong ratcheting of the films, which is indicative of cyclic plastic creep. Microstructural investigations clearly show grain boundary sliding in very thin films with columnar grains extending through the thickness.

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“…Relevant works published in EM within the last decade include reports of new micromechanical testing devices that are capable of nanometer-resolution measurements of the tensile and flexure strength of materials employed in the construction of MEMS [89,90]. Another work employed a novel microtensile testing method to investigate the failure characteristics of copper thin films, a potential construction material for MEMS [91]. In 2005, Ozdoganlar et al evaluated a straightforward method of studying the dynamic behavior of MEMS using a piezoelectric shaker and a laser interferometer [92].…”

Section: Sensors and Microscale Devicesmentioning

confidence: 99%

The Evolution of the Field of Biomechanics Through the Lens of Experimental Mechanics

Grande-Allen

2010

Exp Mech

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Biomechanics is a young field that entails the study of the mechanical aspects of the life and health sciences. The growth of this field can be attributed to the growth of cutting-edge technologies that enable scientists to investigate the mechanics of life with increasing acuity. Founded in 1961, the journal Experimental Mechanics (EM) has had an important role in the growth and scholarship of the field of biomechanics. From the mid-1960's to mid-1970's, relevant publications in EM focused on characterizing potential bioimplants and exploring the mechanical properties of connective tissues. The next two decades witnessed a clear drop in biomechanics papers in EM, perhaps due to the rise of biomechanics-specific societies and journals that offered a more dedicated audience while EM sought a more varied readership. More recently, there has been a resurgence of biomechanics publications in EM, including 3 recent special issues devoted to the subject. The journal has brought forth an impressive range of biomechanics related papers including cellular and nanoscale studies, characterization of biological tissues and novel biomaterials, and most importantly, the development of novel technologies and devices that are applicable across the entire field. Digital image correlation and digital volume correlation are examples of techniques presented in EM that have been applied to numerous biomechanics problems. Although the field has exhibited exponential growth in the past 15 years, a myriad of scientific questions, especially on the cellular and subcellular level, remain to be answered. EM should cultivate its future role in shaping this exciting field.

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Novel Microtensile Method for Monotonic and Cyclic Testing of Freestanding Copper Thin Films

Cited by 21 publications

References 50 publications

Failure of metals III: Fracture and fatigue of nanostructured metallic materials

Failure of metals III: Fracture and fatigue of nanostructured metallic materials

Bulge fatigue testing of freestanding and supported gold films

The Evolution of the Field of Biomechanics Through the Lens of Experimental Mechanics

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