Co/SiO 2 catalysts were prepared by a stepwise impregnation of aqueous solutions containing Co nitrate or chelating agent, nitrilotriacetic acid (NTA) or trans-1,2-diaminocyclohexane-N,N,N 0 ,N 0 -tetraacetic acid (CyDTA), with various concentrations of Co 2+ and the chelating agent. Fischer-Tropsch synthesis activity of Co/SiO 2 catalysts having Co loadings of 5-20 mass% as metallic Co was improved by the stepwise impregnation method with these chelating agents. The catalyst prepared with CyDTA (Co loading = 20 mass%, Co 2+ /CyDTA = 4 mol mol -1 ) yielded 1,500 and 815 g kg-cat -1 h -1 of C 5+ and C 10-20 hydrocarbons at 503 K and 1.1 MPa, respectively, which was much greater than that with the catalyst prepared from the aqueous solution containing both Co nitrate and NTA.