2014
DOI: 10.7567/apex.7.056602
|View full text |Cite
|
Sign up to set email alerts
|

Novel SIMS system with focused massive cluster ion source for mass imaging spectrometry with high lateral resolution

Abstract: Recent developments in cluster ion beams for secondary ion mass spectrometry (SIMS) have enabled the realization of molecular depth profiling and mass imaging of organic and biological materials. Massive Ar cluster beams present reduced surface damage and fragmented ion generation and are suitable as primary beams for SIMS. We recently obtained a finely focused massive 1.2-µm-diameter cluster ion beam and combined it with an orthogonal acceleration time-of-flight mass spectrometer. A mesh pattern of a phosphol… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

1
18
0

Year Published

2014
2014
2019
2019

Publication Types

Select...
9

Relationship

1
8

Authors

Journals

citations
Cited by 32 publications
(19 citation statements)
references
References 29 publications
1
18
0
Order By: Relevance
“…The GCIB ions are not easily focused, but have been utilized in a dual beam environment for removing residual damage accumulation left by the analyzing beam, resulting in improved molecular depth profiling [5, 10]. A tightly focused Ar 1000 + cluster ion beam has been reported to imaging organic grid with ~4 μm beam diameter [11]. Another popular ion source utilizes C 60 + ions.…”
Section: Introductionmentioning
confidence: 99%
“…The GCIB ions are not easily focused, but have been utilized in a dual beam environment for removing residual damage accumulation left by the analyzing beam, resulting in improved molecular depth profiling [5, 10]. A tightly focused Ar 1000 + cluster ion beam has been reported to imaging organic grid with ~4 μm beam diameter [11]. Another popular ion source utilizes C 60 + ions.…”
Section: Introductionmentioning
confidence: 99%
“…25 The Ar-GCIB has also been successfully used for imaging of biological tissue with satisfactory lateral resolution. 26 The advances in this technique have made lateral resolutions of a few micrometers possible for imaging a metal grid 27 as well as biological samples. 28 In addition, high mass species, such as phosphatidylcholine (PC) lipid dimers of approximately m / z 1545, were detected.…”
mentioning
confidence: 99%
“…The experiments were carried out in a new custom-built SIMS instrument in the group of Jiro Matsuo at Kyoto University [44,45] which consists of a gas cluster ion source and primary beam line and an orthogonal-acceleration time-of-flight mass spectrometer (TOF-MS) for the detection of sputtered secondary ions. In the ion source, neutral Ar clusters are formed by the supersonic expansion of a high-pressure gas (∼0.35 MPa) through a nozzle (0.1 mm diameter) and are then introduced into the ionizing chamber.…”
Section: Methodsmentioning
confidence: 99%