Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror Array

Yamashita, Shinji; Mita, Makoto; Fujita, Hiroyuki; Yamamoto, Tomohiko; Kawai, Maki; Yano, Masaaki

doi:10.1109/sensor.2007.4300434

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007

DOI: 10.1109/sensor.2007.4300434

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Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror Array

Shinji Yamashita

Makoto Mita

Hiroyuki Fujita

et al.

Abstract: We have proposed a novel structure of one dimensional spatial light phase modulator (SLPM) that consists of a micromirror array on an SOI wafer and ITO (Indium Tin Oxide) electrodes on a glass plate. Each micromirror can exhibit bidirectional single-axis rotation, as well as up-and downtranslation motion. We have fabricated the device, and confirmed its motion experimentally.

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Cited by 2 publications

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MEMS dual-mode electrostatically actuated micromirror

Xiong

Xie

2014

Proceedings of the 2014 Zone 1 Conference of the American Society for Engineering Education

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Micromirrors based on MEMS (Microelectromechanical Systems) technology have been widely used in light display, optical communication and other applications.In this paper, an electrostatically actuated dual-mode micromirror device is proposed. Folded beam structure is used for piston movement and straight beams are used for torsional movement. Two switches connected to bottom aluminum driving electrodes are used to control the working mode of the micromirror. Depending on the need, it can be activated to work in either piston or torsional mode. The working principle of the micromirror is analyzed. Equations are derived to predict the performance of the micromirror in both piston and torsional modes. ANSYS simulation is used to verify the vibrational modes of the dual-mode micromirror. The proposed micromirror integrates both piston and torsional functions in a single device, leading to more flexibility and better efficiency. Keywords -Microelectromechanical Systems (MEMS), Micromirror, Dual-mode, Piston Micromirror, TorsionalMicromirror.

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MEMS dual-mode electrostatically actuated micromirror

Xiong

Xie

2014

Proceedings of the 2014 Zone 1 Conference of the American Society for Engineering Education

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Optical beam shaping by spatial light phase modulator with bidirectional Tilt-Piston micromirror array

Yamashita

Mita

Fujita

et al. 2008

2008 Conference on Lasers and Electro-Optics

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Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror Array

Cited by 2 publications

References 8 publications

MEMS dual-mode electrostatically actuated micromirror

MEMS dual-mode electrostatically actuated micromirror

Optical beam shaping by spatial light phase modulator with bidirectional Tilt-Piston micromirror array

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