Nuclear reaction analysis of hydrogen migration in silicon dioxide films on silicon under 15N ion irradiation

Ecker, Klaus; Krauser, J.; Weidinger, A.; Weise, H.P.; Maser, K.

doi:10.1016/s0168-583x(99)00830-7

Cited by 11 publications

(4 citation statements)

References 5 publications

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“…Currently, we have no information about H + profiles and internal electric fields on μm length scales under the anode. H + profiles cannot be obtained by means of EDX, but 15 N nuclear reaction profiling techniques can be used [19].…”

Section: Discussionmentioning

confidence: 99%

Investigation of bioglass–electrode interfaces after thermal poling

Mariappan

Roling

2008

Solid State Ionics

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Electrical and electrochemical processes in a bioactive soda-lime phosphosilicate glass and in a bioabsorbable soda-lime phosphate glass during thermal poling were studied by means of thermally stimulated polarization and depolarization current measurements (TSPC and TSDC), ac impedance spectroscopy, and SEM/EDX analyses. The thermal poling was done by sputtering thin Pt electrode films onto the faces of the glass samples and by applying voltages up to 750 V to the electrodes at temperatures up to 513 K. The poling leads to the formation of interfacial layers under the electrodes which are responsible for two depolarization current peaks. The Na + depletion layer under the anode causes an additional semicircle in a Nyquist plot of the ac impedance. The SEM/EDX profiles suggest that redox and transport processes of Na + ions are responsible for the formation of the interfacial layers, while the Ca 2+ ions are immobile under the poling conditions. From the EDX profile of the Na + depletion under the anode, we calculate a hypothetical voltage drop in the depletion layer under the assumption that there is no charge compensation. Since the calculated voltage drop is much larger than the poling voltage, we conclude that the negative charge density due to Na + depletion must be compensated, at least to a large extent, by the presence of other charge carriers, most likely protons.

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Section: Discussionmentioning

confidence: 99%

Investigation of bioglass–electrode interfaces after thermal poling

Mariappan

Roling

2008

Solid State Ionics

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“…Note, however, that the H accumulation in the interfacial regions seen in the depth profiles may partially result from the NRA analysis itself, because the 15 N ion irradiation can cause redistribution of hydrogen in the material. This is a well-known effect 35,[38][39][40] and any possible H relocation during the NRA analysis should be verified by measuring the H concentration evolution at the accumulation peak depth on a non-irradiated sample spot in the course of continued 15 N ion irradiation. Although this beam-induced H relocation effect can make determining the original H distribution in a specimen somewhat more difficult, it can be exploited for analytical purposes in dielectric reliability research to evaluate H redistribution trends between intact interfaces of (model) MOS device structures, providing information on relative material-specific H mobilities.…”

Section: Discussionmentioning

confidence: 94%

Quantification of Hydrogen Concentrations in Surface and Interface Layers and Bulk Materials through Depth Profiling with Nuclear Reaction Analysis

Wilde

Ohno

Ogura

et al. 2016

JoVE

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Nuclear reaction analysis (NRA) via the resonant (1)H((15)N,αγ)(12)C reaction is a highly effective method of depth profiling that quantitatively and non-destructively reveals the hydrogen density distribution at surfaces, at interfaces, and in the volume of solid materials with high depth resolution. The technique applies a (15)N ion beam of 6.385 MeV provided by an electrostatic accelerator and specifically detects the (1)H isotope in depths up to about 2 μm from the target surface. Surface H coverages are measured with a sensitivity in the order of ~10(13) cm(-2) (~1% of a typical atomic monolayer density) and H volume concentrations with a detection limit of ~10(18) cm(-3) (~100 at. ppm). The near-surface depth resolution is 2-5 nm for surface-normal (15)N ion incidence onto the target and can be enhanced to values below 1 nm for very flat targets by adopting a surface-grazing incidence geometry. The method is versatile and readily applied to any high vacuum compatible homogeneous material with a smooth surface (no pores). Electrically conductive targets usually tolerate the ion beam irradiation with negligible degradation. Hydrogen quantitation and correct depth analysis require knowledge of the elementary composition (besides hydrogen) and mass density of the target material. Especially in combination with ultra-high vacuum methods for in-situ target preparation and characterization, (1)H((15)N,αγ)(12)C NRA is ideally suited for hydrogen analysis at atomically controlled surfaces and nanostructured interfaces. We exemplarily demonstrate here the application of (15)N NRA at the MALT Tandem accelerator facility of the University of Tokyo to (1) quantitatively measure the surface coverage and the bulk concentration of hydrogen in the near-surface region of a H2 exposed Pd(110) single crystal, and (2) to determine the depth location and layer density of hydrogen near the interfaces of thin SiO2 films on Si(100).

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“…Whilst this has a strong narrow resonance at 6.385 MeV (laboratory energy), the main problem is to obtain a good 15 N ion beam, because the 15 N abundance in natural N is below 1% and N does not form a stable negative ion as is necessary in tandem accelerators. An application [14] of H depth profi ling is shown in Figure 14.2 , where the gamma yield as a function of projectile energy is shown in Figure 14.2 a. Here, the projectile energy E p = E r + Δ E , where E r is the resonance energy (6.385 MeV) and Δ E is the abscissa.…”

Section: Applicationsmentioning

confidence: 99%

Nuclear Reaction Analysis (NRA)

Benka

2011

Surface and Thin Film Analysis

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Nuclear reaction analysis of hydrogen migration in silicon dioxide films on silicon under 15N ion irradiation

Cited by 11 publications

References 5 publications

Investigation of bioglass–electrode interfaces after thermal poling

Investigation of bioglass–electrode interfaces after thermal poling

Quantification of Hydrogen Concentrations in Surface and Interface Layers and Bulk Materials through Depth Profiling with Nuclear Reaction Analysis

Nuclear Reaction Analysis (NRA)

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