Cavitation plays an important role in plants operating at high temperatures since the cavitation controls the creep failure of engineering alloys. In the past it has been difficult to predict the cavitation behaviour with the help of basic models, since critical models have been missing. Recently new models have been formulated for grain boundary sliding, cavity nucleation and cavity growth to fill this gap. These models are reviewed in this chapter. It is shown that the new models can quantitatively predict cavitation for austenitic stainless steels, where detailed experimental information is available.