2003
DOI: 10.1016/s0169-4332(03)00445-8
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Nucleation and growth of nanocrystalline silicon studied by TEM, XPS and ESR

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Cited by 58 publications
(40 citation statements)
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“…It has been reported that hydrogen atoms can passivate the defect states to improve the luminescence intensity and stability [17,18]. K. Sato et al reported that the PL intensity of nano-crystalline Si (nc-Si) can be increased more than one order of magnitude by using hydrofluoric acid solution to passivate the non-luminescence states [15].…”
Section: Discussionmentioning
confidence: 99%
“…It has been reported that hydrogen atoms can passivate the defect states to improve the luminescence intensity and stability [17,18]. K. Sato et al reported that the PL intensity of nano-crystalline Si (nc-Si) can be increased more than one order of magnitude by using hydrofluoric acid solution to passivate the non-luminescence states [15].…”
Section: Discussionmentioning
confidence: 99%
“…1. The samples were deposited on a p-type Si (1 0 0) substrate using a radio frequency (RF) sputtering method [2]. The sputtering target used 36 pieces of p-type Si (1 0 0) chips with 5 Â 5 mm placed on a silica (SiO 2 ) with a purity of 99.99% and a 100 mm diameter.…”
Section: Methodsmentioning
confidence: 99%
“…When modelling multi-pulse annealing regime, the equation of heat transfer is solved first of all for a onepulse regime using equations (2)(3)(4)(5)(6). After that, the results obtained are taken as initial equations, and equations (2-6) are solved again, this time with new initial conditions.…”
Section: Theorymentioning
confidence: 99%
“…Last years, a need is aroused appreciably for elaborating physical foundations for creation of composite materials on silicon base [1,2]. In particular, investigation begins of structures with nanoparticles of silicon brought up inside SiO 2 with attributes that make it possible to use them for creating new generation of opto-, micro-, and nano-electronic equipment facilities (light-emitting diodes, lasers, solar cells, memory elements, and so on).…”
Section: Introductionmentioning
confidence: 99%