Abstract. In copper extrusion, the dies are continuously subjected to high thermo-mechanical stress. This results in elastic and plastic die deformation as well as extensive wear. To estimate the strain of possible hard phase surface modifications during service, knowledge of the deformation behavior of the extrusion dies is required. Therefore, the plastic deformation of dies made of four different tool materials was investigated in the present study. The applied tool materials were hot-work tool steel 1.2367, special hot-work tool steel CS1, nickel-based alloy 2.4668 (Alloy 718) and cobalt-based alloy 2.4775 (Stellite 1). 3D scans of the dies were created, both in the initial state and after each of three extrusion cycles, utilizing structured-light scanning. The extrusion trials were carried out using an 8MN extrusion press configured for direct extrusion and billets made of commercially pure copper Cu-DHP (CW024A). By evaluation of the 3D scans, the progression of plastic die deformation was determined in dependence on the tool material. Finally, the results were compared to corresponding numerical investigations on die deformation.