Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing

Xia, Feng; Zhang, Xinzheng; Wang, Meng; Yi, Sanming; Liu, Qian; Xu, Jingjun

doi:10.1364/oe.22.016889

Cited by 5 publications

(3 citation statements)

References 23 publications

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“…The contact angle hysteresis for both chemically etched and laser-textured patterns also reflects the different wetting properties (see Tables S1 and S2, Supporting Information). This is because the laser beam melts the porous film and significantly reduces the roughness of the scanned areas (Figure e), , while the surrounding unscanned areas still keep the porosity and the superhydrophobicity. As a result, there is a significant difference in surface wettability at the edge of the laser-processed area (Figure f).…”

Section: Resultsmentioning

confidence: 99%

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Wang¹,

Liu

Zhang

et al. 2017

ACS Appl. Mater. Interfaces

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139

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Directional water collection has stimulated a great deal of interest because of its potential applications in the field of microfluidics, liquid transportation, fog harvesting, and so forth. There have been some bio or bioinspired structures for directional water collection, from one-dimensional spider silk to two-dimensional star-like patterns to three-dimensional Nepenthes alata. Here we present a simple way for the accurate design and highly controllable driving of tiny droplets: by laser direct writing of hierarchical patterns with modified wettability and desired geometry on a superhydrophobic film, the patterned film can precisely and directionally drive tiny water droplets and dramatically improve the efficiency of water collection with a factor of ∼36 compared with the original superhydrophobic film. Such a patterned film might be an ideal platform for water collection from humid air and for planar microfluidics without tunnels.

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Section: Resultsmentioning

confidence: 99%

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Wang¹,

Liu

Zhang

et al. 2017

ACS Appl. Mater. Interfaces

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139

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“…For example, Liu's group used femtosecond laser direct processing of metal-transparent metal oxides. The fabrication mechanism is attributed to light-induced melt oxidation, which uses non-linear effects to limit the size of the oxidized region, enabling subwavelength processing [38,39] (Figure 1A). In 2020, Huang et alused femtosecond laser to process the 3D shell-like structures of gold films.…”

Section: Advances In Femtosecond Laser Preparation Of Precious Metal ...mentioning

confidence: 99%

Femtosecond Laser Fabrication of Noble Metal Plasma Nanostructures and Its Application-A Mini Review

et al. 2022

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Noble metal plasmonic nanostructures have a wide range of applications in surface-enhanced Raman scattering (SERS), solar energy conversion, optical imaging, biosensing, and many other fields due to their unique localized surface plasmon resonance effects and optical properties. In recent years, the fabrication method of noble metal plasmonic nanostructures has attracted a lot of research interest. Compared with traditional processing methods, femtosecond laser processing has the advantages of high processing resolution, small heat-affected zone, high processing flexibility, controllability, and ease of patterning, and has shown great potential for application in the fabrication method of noble metal plasmonic nanostructures. In this paper, the recent advances in the fabrication of noble metal plasmonic nanostructures by femtosecond laser are reviewed, followed by a discussion of the characteristics, advantages, and potential applications of the structures prepared by this method.

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“…In this case, lattice temperature and electron temperature are equal to the film temperature. As a result, twotemperature model can be simplified into the typical heat conduction equation [10]:…”

Section: Numerical Simulation and Theoretical Analysesmentioning

confidence: 99%

Fabrication-resolution enhancement method based on low-energy multiple exposures

Wang

Zhang

et al. 2015

Opt. Express

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Laser direct writing (LDW) as a significant maskless lithography technique has been widely applied in scientific research and industrial manufacture. However, low fabrication resolution restricts its application in nanofabrication due to optical diffraction limit. This work presents a simple and novel way to improve the LDW fabrication resolution by multiple-exposure method with a low energy laser beam. Experiments indicate that the method could increase the fabrication resolution by 33.3% for the same exposure depth, and is close to simulation results. It should be pointed out that principle of the method is universal, and may be instructive to improve the fabrication resolution of other maskless energy beam lithography techniques such as EBL and FIB.

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Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing

Cited by 5 publications

References 23 publications

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Laser Direct Writing of Tree-Shaped Hierarchical Cones on a Superhydrophobic Film for High-Efficiency Water Collection

Femtosecond Laser Fabrication of Noble Metal Plasma Nanostructures and Its Application-A Mini Review

Fabrication-resolution enhancement method based on low-energy multiple exposures

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