Numerical and Experimental Analysis for the Small Vibration of Aerostatic Guideways

Aoyama, Tojiro; Kakinuma, Yasuhiro; Kobayashi, Yasuyuki

doi:10.1016/s0007-8506(07)60449-1

Cited by 60 publications

(44 citation statements)

References 2 publications

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“…Therefore, optimization of the bearing clearance is required to improve performance of aerostatic guideway. In general, the stiffness of aerostatic bearing has the maximum value in relative to the bearing clearance (Aoyama, et al, 2006, Nishio, et al, 2011, Yoshimoto, et al, 1999. In order to design the suitable bearing clearance of aerostatic guideway developed, the relationship between the bearing clearance and the stiffness was investigated.…”

Section: Positioning System With the Proposed Aerostatic Guidewaymentioning

confidence: 99%

Magnetically preloaded aerostatic guideway for high speed nanometer positioning

Tsumura

Yoshioka

Shinno

et al. 2014

JAMDSM

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Demands for nanometer positioning with a high resolution and a long stroke have increased in a variety of industries. Performance of guide elements is one of the most important issues for realizing such positioning systems. In general, an ultra-precision positioning system has aerostatic guideway which can restrain a moving table without non-linear behavior, i.e., friction and backlash. Characteristics of aerostatic guideway affect the performance of the positioning system. This study is aiming at developing an aerostatic guideway which can achieve a high speed nanometer positioning. The aerostatic guideway preloaded by magnetic attraction force can lead to provide a compact structure, and the characteristics can be easily controlled without increased driving force. However, the relative velocity between permanent magnets and the attracted surface causes the induced eddy current, which deteriorates the performance during high speed positioning. In this study, in order to minimize the eddy current loss, the magnetic attraction force is successfully added to a mechanism following the positioning table. In order to evaluate the proposed structure, a positioning system is developed by using the magnetic attraction force preloaded aerostatic guideway. The positioning system is constructed by a positioning table and a following table. Basic characteristics of the aerostatic guideway are experimentally evaluated. From the results, the magnetic attraction force-preloaded guideway can be designed so as to obtain high stiffness. By optimizing the magnetic force, the performance of the positioning system was evaluated. The experimental results of frequency response confirm that the response of the positioning system can be improved by applying magnetic attraction force. In addition, the results of stepwise positioning confirm that the proposed positioning system has high positioning resolution. These results confirm that the proposed guideway achieves high speed nanometer positioning capability.

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Section: Positioning System With the Proposed Aerostatic Guidewaymentioning

confidence: 99%

Magnetically preloaded aerostatic guideway for high speed nanometer positioning

Tsumura

Yoshioka

Shinno

et al. 2014

JAMDSM

View full text Add to dashboard Cite

show abstract

“…In order to restrain the fluctuation of gas film [4][5] , the structure of the throttle was reformed.…”

Section: Introductionmentioning

confidence: 99%

Study on Lubrication Theory of Orificed Throttle Based on Molecule Collision

Wei

Gong

Yang

2016

MATEC Web of Conferences

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Orifice restriction is a traditional form of throttle used in aerostatic guide way. Practically, self-excited vibration or even air hammer phenomenon will appear in gas film interior when supply gas enlarges or the film thickness decreases to micron scale. In order to analyze the process from the pressure inlet to the entrance of completely developed laminar flow, Reynolds Equation coupled with the first order velocity slip is used. Since it has rarefied property, turbulence model and molecular dynamics theory are adopted based on molecular collision theory. This paper reveals the internal cyclone law in gas chamber and the relationship between essence of the shock formation and the gas molecule velocity excitation. Further study shows that, supply pressure, film parameters and chamber parameters have important influences on cyclone phenomenon and shock wave.

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“…Micro vibration is different from the "air hammer phenomenon" from the static pressure guide , It is mainly due to the gas film clearance between the film and the internal support platform of uneven force distribution has certain amplitude near the equilibrium position of the law on the deflection or vibration. Aoyamae et al It is speculated that the micro vibration in gas bearing is caused by the flow of gas in the pressure chamber [4]:Chenxuedong et al Through the simulation experiments, it is proved that the phenomenon of the air cavity of the small orifice throttle air pressure guide rail is related to the micro vibration, Gas flow in the gas film can also cause the micro vibration, but less than the micro vibration of the cyclone[5] Zhang Ming et al Think that the main reason of the micro vibration in the ultra precision working table system of the air bearing is that the turbulence of the gas flow in the gas flow is formed and the measures to restrain the vibration of the micro vibration [6].Dong Ju Chen et al by Reynolds equation derived row orifice form hydrostatic slideway of the gas film stiffness formula and Study on machining accuracy of workpiece caused by fluctuation of gas membrane effect [7].Ji Lujun et al Use the linear perturbation method to establish the stability of the Reynolds equation and the Reynolds equation and the bearing motion equation to study the dynamic analysis model of the vertical impact caused by the static pressure rail fluctuations [8]. The amplitude of the micro vibration is typically between a few nanometers to tens of nanometers, and the frequency range from tens of hertz to several thousand hertz.…”

Section: Introductionmentioning

confidence: 99%

Analysis of micro vibration in gas film of aerostatic guide way based on molecule collision theory

2016

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Abstract. Micro vibration of the aerostatic guide way has a significant impact on its dynamic characteristics and stability, which limits the development of pneumatic component. High pressure gas molecules have been collided with the supporting surface and the internal surface of the throttle during the flow process. Variable impulse of the surfaces aside for the gas film are affected by the changes of impulse which formed irregular impact force in horizontal and vertical direction. Micro-vibration takes place based on the natural frequency of the system and its frequency doubling. In this paper, the vibration model was established to describe the dynamic characteristics of the gas film, and the formation mechanism of micro vibration in the film is defined. Through the simulation analysis and experimental comparison, formation mechanism of the micro vibration in the gas film is confirmed. It was proposed that the micro vibration of gas film can be produced no matter whether there is a gas chamber or not in the throttle. Under the same conditions, the micro vibration of the guide way with air chamber is greater than that without any chamber. The frequency points of the vibration peaks are almost the same, as well as the vibration pattern in the frequency domain.

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Numerical and Experimental Analysis for the Small Vibration of Aerostatic Guideways

Cited by 60 publications

References 2 publications

Magnetically preloaded aerostatic guideway for high speed nanometer positioning

Magnetically preloaded aerostatic guideway for high speed nanometer positioning

Study on Lubrication Theory of Orificed Throttle Based on Molecule Collision

Analysis of micro vibration in gas film of aerostatic guide way based on molecule collision theory

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