Numerical and experimental studies of a flat acoustic source that is actuated by an integrated flexure-based piezoelectric mechanism

Tajdari, Farnaz; Berkhoff, Arthur P.; Boer, A. de

doi:10.1016/j.jsv.2020.115435

Cited by 4 publications

(4 citation statements)

References 14 publications

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“…piezoelectric sheets, piezoelectric stacks have been widely used in the field of precision micro-drives. However, due to limitations in structure, piezoelectric stacks are not easy to connect into a large mass inertia block, so their driving ability is limited [2,34,35]. To increase the driving capacity, multiple piezoelectric stacks are usually required, and the cost of the driver is high.…”

Section: Structural Principle Of Actuatormentioning

confidence: 99%

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

et al. 2022

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A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices.

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Section: Structural Principle Of Actuatormentioning

confidence: 99%

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

et al. 2022

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“…A precision micropositioner using piezoelectric components as the actuators can overcome the shortcomings of conventional positioning devices and have unique advantages in micron and sub-micron precision positioning control [6][7][8][9][10]. According to previous research results, piezoelectric actuators could include conventional piezoelectric components [11,12], piezoceramic bimorphs [13][14][15], piezoelectric stacks [16,17] and composite structures, etc.…”

Section: Introductionmentioning

confidence: 99%

“…The number of layers is proportional. Tajdari et al [16] used a piezoelectric stack as the excitation part of the sound source, and designed a flexure mechanism as a displacement conversion mechanism.…”

Section: Introductionmentioning

confidence: 99%

Finite Element Analysis and Polarization Test of IDEs Piezoelectric Actuator

et al. 2022

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A new type of actuator is presented in the paper that integrates the IDEs into a conventional piezoelectric sheet. The electrodes and polarization play a key role in the strain. Adopting constitutive equations of piezoelectric theory and variation principles in elasticity theory, the piezoelectric component dynamic equation was deduced. Several finite element models of the IDEs piezoelectric actuator were established in ANSYS. The effect of branch electrodes on the strain of the actuator was analyzed. The results show that the strain can be bigger than that of the conventional piezoelectric sheet by decreasing the gap and increasing the width of electrodes. According to the FEM result, some IDEs piezoelectric actuators were prepared. The distribution of the static electric field inside the actuator was researched to determine the polarization voltage. The 2671 high voltage power and DU-20 temperature-controlled oil bath was applied to explore the polarization process. The effect of the voltage, time and temperature on the strain of the actuator was researched by a TF2000 and SIOS laser interferometer. The results show that the optimum polarization is 800 V, for 60 min and at 150 ℃. The strain of the IDEs piezoelectric actuator is 1.87 times that of the conventional piezoelectric actuator. The actuators could prove to be helpful applications for micro-nano devices.

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“…With piezoelectric actuators, small displacements are produced by the inverse piezoelectric effect of piezoelectric materials. They also have the advantages of a simple structure, fast response, high controllable precision, low energy consumption, small size and flexible combination [ 12 , 13 ]. In response to the demands of different fields, piezoceramic sensors and actuators have evolved rapidly.…”

Section: Introductionmentioning

confidence: 99%

An Experimental Investigation on Polarization Process of a PZT-52 Tube Actuator with Interdigitated Electrodes

et al. 2022

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The manipulator is the key component of the micromanipulator. Using the axial expansion and contraction properties, the piezoelectric tube can drive the manipulator to achieve micro-motion positioning. It is widely used in scanning probe microscopy, fiber stretching and beam scanning. The piezoceramic tube actuator used to have continuous electrodes inside and outside. It is polarized along the radial direction. There are relatively high polarization voltages, but poor axial mechanical properties. A new tubular actuator is presented in this paper by combining interdigitated electrodes and piezoceramic tubes. The preparation, polarization and mesoscopic mechanical properties were investigated. Using Lead Zirconate Titanate (PZT-52) as a substrate, the preparation process of interdigitated electrodes by screen printing was studied. For initial polarization voltage determination, the local characteristic model of the actuator was extracted and the electric field was analyzed by a finite element method. By measuring the actuator’s axial displacement, we measured the actuator’s polarization effect. Various voltages, times and temperatures were evaluated to determine how polarization affects the actuator’s displacement. Optimal polarization conditions are 800 V, 60 min and 150 °C, with a maximum displacement of 0.88 μm generated by a PZT-52 tube actuator with interdigitated electrodes. PZT-52 tube actuators with a continuous electrode cannot be polarized under these conditions. The maximum displacement is 0.47 μm after polarization at 4 kV. Based on the results, the new actuator has a more convenient polarization process and a greater axial displacement from an application standpoint. It provides technical guidance for the preparation and polarization of the piezoceramic tube actuator. There is potential for piezoelectric tubular actuators to be used in a broader range of applications.

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Numerical and experimental studies of a flat acoustic source that is actuated by an integrated flexure-based piezoelectric mechanism

Cited by 4 publications

References 14 publications

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

Finite Element Modeling and Test of Piezo Disk with Local Ring Electrodes for Micro Displacement

Finite Element Analysis and Polarization Test of IDEs Piezoelectric Actuator

An Experimental Investigation on Polarization Process of a PZT-52 Tube Actuator with Interdigitated Electrodes

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