Numerical characterization of dual radio frequency micro-discharges

Abstract

Micro-discharges have many excellent characteristics, such as generation of high-density and non-equilibrium plasmas at atmospheric pressure. In this paper, we used an implicit particle-in-cell/Monte Carlo collision method for three-dimensional velocities in a one-dimensional space combined with the secondary electron emission model to study the characteristics of micro-discharges driven by dual radio frequency (RF) power. The effect on plasma parameters was observed by varying the voltage of the RF power, the frequency, and the gas pressure of the discharge. Since the electrode spacing is very small in micro-discharges, the voltage change will affect the characteristics of micro-discharges. In addition, the plasma density increases with the frequency and the discharge mode changes at different frequencies. Finally, the influence of gas pressure on the characteristics of micro-discharges cannot be ignored. When the air pressure decreases, the ion flux reaching the electrodes is significantly increased, and the energy distribution of ions increases in the high-energy portion.